Micro electro mechanical interference platform with closed-loop control system and control method of micro electro mechanical interference platform

Abstract

The invention discloses a micro electro mechanical interference platform with a closed-loop control system and a control method of the micro electro mechanical interference platform. The micro electro mechanical interference platform comprises an optical path system and a closed-loop control circuit system. In the optical path system, whether an index mirror of the interference platform is shifted is judged by monitoring whether reflected optical spots on a quadrant detector are shifted, when the quadrant detector detects that the optical spots are shifted, the closed-loop control circuit system adjusts a voltage signal for driving a micromirror correspondingly through arithmetic processing, the index mirror of the interference platform is reset to an original set angle, the micromirror is locked on the original angle automatically in a whole axial moving process of the index mirror of the interference platform, and control of the index mirror surface shape is achieved. The platform can conduct real-time controlling, and guarantees accuracy of a micromirror surface, and an interference system adopting a micro processing method is low in cost, easy to achieve and good in practicality.

Description

technical field [0001] The invention relates to the field of optical and electronic circuit design of micro-electro-mechanical systems, and more specifically, to a micro-electro-mechanical interference platform with a closed-loop control system and a control method thereof. Background technique [0002] Micro-electro-mechanical systems (MEMS for short) is a three-dimensional device manufactured by micro-machining technology, including at least one movable structure to satisfy a certain mechanical action. MEMS devices are used in many different fields because they borrow the technology of integrated circuits. More and more sensors and actuators in this century tend to adopt MEMS technology, among which microelectromechanical system micromirrors are an excellent example. The force generated by the MEMS-actuated structure is small but sufficient to drive the deflection of the mirror. Among the many MEMS micromirrors, the electrothermal micromirror is a microelectromechanical ...

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Problems solved by technology

[0004] Although there are some relatively mature control schemes in the field of MEMS micromirrors, there is no mature system scheme for micro-electromechanical interference platforms, especially low-cost and high-reliability micro-interference platforms.

[0005] Based on the above description, there is an urgent need for a micro-electromechanical interference platform with a closed-loop control system to solve the problems of low control resolution, high cost and poor reliability of the micro-electromechanical interference platform in the prior art

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