Ion source device and ion beam generating method
An ion beam and ion source technology, which is applied in the direction of ion beam tubes, discharge tubes, electrical components, etc., can solve the problems of shortening and increasing the life of the cathode 22, and achieve the effect of increasing the beam current.
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[0028] An embodiment of an ion source device according to the present invention will be described with reference to FIG. 1 . Figure 1A It is a front view of the ion source device viewed from the extraction part side of the ion beam, but it is assumed that the Figure 1B The state of the suppression electrode 14-1 and the ground electrode 14-2 is shown as observed.
[0029] [structure]
[0030] In FIG. 1 , the ion source device includes an arc chamber 10 having a space for forming plasma. The arc chamber 10 has a cylindrical shape. Here, the cylindrical arc chamber 10 is placed horizontally to form an electron source on one end side (back side) in the direction of the central axis. Like the electron source described in FIG. 3 , the electron source in this ion source device also includes a filament 11 and a cathode 12 . The cathode 12 emits thermal electrons for generating beam electrons that ionize neutral molecules from its thermal electron emitting surface. A reflector 1...
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