Novel railboat for diffusing silicon wafers

Abstract

The invention discloses a novel railboat for diffusing silicon wafers. The silicon wafers are placed on the novel railboat. The novel railboat for diffusing the silicon wafers comprises a boat body, at least three clamping grooves for containing the silicon wafers are formed in the boat body, the distances between any one of the clamping grooves and adjacent clamping grooves are L1 and L2, L1 is larger than L2 or L2 is larger than L1, and the clamping grooves are arranged at the intervals of L1, L2, L1, L2 in sequence. L2 is 1 / 2-1 / 7 of L1, or L1 is 1 / 2-1 / 7 of L2. Due to the fact that the distance of the front faces of the silicon wafers is not changed, the uniformity of diffusion is not influenced by the novel railboat. The structure of the novel railboat is combined with an insertion mode, compared with the railboat with an ordinary traditional structure being combined with the insertion mode, the novel railboat has the same gettering effect with a traditional insertion mode a, is higher in battery efficiency and productivity. The ordinary railboat can not meet the requirements of battery efficiency and productivity at the same time, while the novel railboat with the strucuture being combined with the insertion mode can meet the requirements of battery efficiency and productivity at the same.

Description

technical field [0001] The invention belongs to the field of manufacturing crystalline silicon solar cells, in particular to a novel quartz boat for diffusion. Background technique [0002] The role of the diffusion process of crystalline silicon solar cells is to create a PN junction on the front side of the silicon wafer. There are two important indicators in production, efficiency and production capacity. The corresponding diffusion process is phosphorus (for phosphorus diffusion) or boron (for boron diffusion) to silicon. The gettering effect of the chip, the uniformity of diffusion and the number of silicon chips that can be inserted on the quartz boat for each round of diffusion. [0003] At present, the slots of the quartz boats used in the diffusion process in the production of crystalline silicon solar cells are arranged at equal intervals, and the silicon wafers are placed in the slots. There are generally two ways to insert a piece: a. Insert a piece of "double-...

AI Technical Summary

Problems solved by technology

[0008] Reduce the pitch of the slots of the quartz boat to increase the number of slots on the boat, but it will reduce the distance between adjacent silicon wafers, which will affect the uniformity of diffusion and also affect the efficiency of the battery;

[0009] Increase the length of the quartz boat to increase the number of slots on the boat, but this will easily cause the incompatibility between the quartz boat and the diffusion device

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