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Fuel cells for industrial plant backup power using stolen hydrogen

A backup power supply and fuel cell technology, applied in the direction of fuel cells, fuel cell groups, fuel cell additives, etc., can solve the problem that fuel cells are more expensive than batteries

Inactive Publication Date: 2013-09-25
GO2 POWER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Fuel cells have been proposed to be used in conjunction with batteries as backup batteries in manufacturing plants, or to replace batteries, but fuel cells are more expensive than batteries

Method used

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  • Fuel cells for industrial plant backup power using stolen hydrogen

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Embodiment Construction

[0010] see figure 1 , an industrial installation is represented by an automated machine 33 for processing semiconductor wafers 34 . Such processing is accomplished using many different machines that perform different functions in the device. For purposes of simplicity, only one machine 33 is shown that can receive a wafer 34 for depositing one or more thin films and then exit the machine in a wafer stack 36 . Thin film deposition involves processes with critical parameters such as temperature, and such processes are considered critical because it is impossible to interrupt the operation without damaging the wafer. In addition, specific furnaces and reactors must be maintained under specific temperature and pressure conditions to avoid damage to wafers, and are involved in critical fab processes even when substrates are not being processed. For example, when depositing thin films by chemical vapor deposition, the preferred temperature for deposition is generally greater than ...

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Abstract

The invention provides fuel cells for industrial plant backup power using stolen hydrogen, and particularly, a backup power system for industrial plants using purified hydrogen in critical processes. A smart valve at a hydrogen reservoir is used to steal hydrogen and divert the hydrogen to a fuel cell array providing backup power to critical processes. Before the fuel cell array comes online, backup power is provided by a battery array that can also supply backup power as the hydrogen supply is depleted.

Description

technical field [0001] The present invention relates to backup power systems and, in particular, to backup power systems using fuel cells. Background of the invention [0002] In the processing of semiconductor wafers, many processing steps occur at high temperature and low pressure, such as photolithography, chemical diffusion, thin film formation, oxidation, and annealing. Critical processes often take place in furnaces and reactors where temperature and pressure must be maintained to prevent mechanical stress in wafers, which can be worth tens of thousands of dollars per wafer. Expensive damage can occur when the operation of critical processes, as well as critical electronic equipment such as computers, controllers, and data storage devices, is interrupted. For this reason, semiconductor fabs must have a reliable backup power source for use in situations where the main power source fails and critical wafer processes are in jeopardy. [0003] Typical manufacturing plant...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02J9/00H01M8/04H01M8/24
CPCH01M8/04626H01M8/04753H01M2250/20H02J9/06H02J2300/30Y02B90/10Y02E60/50Y02T90/40Y02P90/40H01M8/00
Inventor 詹姆斯·胡希德尼·夸恩
Owner GO2 POWER