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Floating disc suspension polishing device

A technology of polishing device and floating disk, which is applied in the direction of grinding device, grinding machine tool, metal processing equipment, etc., which can solve the problems of unstable grinding, low surface quality and low pressure control precision, achieve stable grinding and improve the quality of processed surface , The effect of small surface damage

Active Publication Date: 2013-10-02
奥特贝(天津)机器人有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the problems of unstable grinding, low pressure control precision and low surface quality in the existing suspension grinding and polishing equipment, the present invention provides a floating disk suspension polishing device with precise pressure, stable grinding, small surface damage and high quality

Method used

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with the accompanying drawings.

[0015] refer to figure 1 with figure 2 , a floating disk suspension polishing device, including a polishing substrate 5, a floating disk 1, a spring 7, a force sensor 8, a lift table 9, and a main drive 6. The polishing base plate 5 is fixedly connected with the main drive 6 and can rotate around the main shaft. The floating plate 1 is fixed with the lifting table 9 by a spring 7. The inner bottom surface of the floating plate 1 is covered with a polishing cloth 2. The base plate 5 and the floating plate 1 are provided with a wedge-shaped groove 10 and a processing station for placing workpieces to be processed along the circumferential direction. The wedge-shaped groove 10 is filled with polishing liquid, and the wedge-shaped groove 10 and the processing station are arranged at intervals. ,

[0016] A plurality of wedges 10 are arranged on the opposite surface of ...

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Abstract

A floating disc suspension polishing device comprises a polishing base disc and a floating disc, wherein wedge grooves and processing stations for placing workpieces to be processed are formed and arranged on the surface, opposite to the floating disc, of the polishing base disc in the circumferential direction; the wedge grooves are filled with polishing solutions; the wedge grooves and the processing stations are arranged at intervals; the polishing device further comprises a spring, a force sensor, a lifting platform and a master driver; the polishing base disc and the master driver are connected and can rotate around a spindle; the polishing base disc is positioned on the floating disc; the floating disc is connected with the upper end of the spring; the lower end of the spring is connected with the force sensor; and the force sensor is fixedly connected with the lifting platform. The floating disc suspension polishing device presses precisely, grinds stably, and is small in surface damage and high in quality.

Description

technical field [0001] The invention relates to a polishing device, in particular to a suspension polishing device. Background technique [0002] The substrate is an indispensable material in the preparation process of the amorphous film, and the properties of the substrate will seriously affect the surface morphology of the amorphous film. In order to obtain a thin, defect-free and good adhesion alloy film, the substrate is required to have less Damaged ultra-smooth surface. Avoid the impact of mechanical damage, pollution, oxidation, excessive corrosion and other factors on the surface, so the traditional chemical mechanical polishing technology is not completely suitable for ultra-precision polishing of amorphous thin film substrates. [0003] Fluid polishing has now become one of the important means to obtain ultra-smooth surfaces. Compared with rigid contact polishing, the contact state between abrasive grains and workpiece surface is soft contact, which can be obtaine...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/00B24B37/34
Inventor 张利金明生孙建辉单晓杭
Owner 奥特贝(天津)机器人有限公司
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