UV imposition method and device
A master and grid technology, applied in the field of UV imposition method and device of devices, can solve the problems of non-splicing, limited fidelity, low position accuracy, etc., achieve excellent filling ability, high positioning accuracy, and wide application range Effect
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[0047] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.
[0048] Such as Picture 12 As shown, the UV imposition method of the present invention includes the following steps:
[0049] Step 1: Prepare a unit pattern master 1 for imposition. The size of the unit pattern master 1 is not limited. The unit pattern master 1 has the required splicing pattern 2, and the splicing pattern 2 is a hologram or has The optical structure of the deep groove is about 30-40 microns thick, and the alignment cross marks 4 are made at the four corners of the required splicing pattern 2. This mark line can be made by photolithography or drawn with fine needles. Cell graphics master 1 such as figure 1 As shown, the shape of the puzzled figure can be any shape such as square, rectangle, triangle, prism, trapezoid, hexagon, etc.; fix the unit pattern master 1 with thin tape 5 on the large glass plate 3, the glass plate 3 For a thic...
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