Micro Fourier transform spectrometer

Abstract

The invention discloses a micro Fourier transform spectrometer comprising a light source and an interference system, wherein the interference system comprises a first beam splitter mirror, a movable mirror and a fixed mirror, a light beam emitted by the light source irradiates onto the first beam splitter mirror, the first beam splitter mirror divides a light beam into two paths, one path of the light beam irradiates the movable mirror, the other path of the light beam irradiates the fixed mirror, two light beams reflected by the movable mirror and the fixed mirror are reflected onto the first beam splitter mirror to form interference light paths and generate interference fringes, the movable mirror is an MEMS (Micro-electromechanical Systems) micro-mirror, the fixed mirror is an MEMS micro-mirror or a plane mirror, and if the fixed mirror is the MEMS micro-mirror, the fixed mirror generates displacement so as to perform phase modulation. The micro Fourier transform spectrometer disclosed by the invention is accurate in precision and small in volume.

Description

technical field [0001] The invention belongs to the technical field of spectrometers and relates to a miniature Fourier transform spectrometer. Background technique [0002] Spectroscopic instruments are powerful tools for analyzing the composition and structure of substances. They can be used for qualitative and quantitative analysis of samples. The requirements of online real-time monitoring and portability in the field and industry promote the development of miniaturization of spectroscopic instruments, and have a broad application space. However, the traditional Fourier transform spectrometer is bulky and expensive, which is not conducive to the popularization of products. [0003] In recent years, research on miniaturized spectrometers has progressed very rapidly. Most of the existing miniature spectrometers still use the principle of classical spectrometers. Due to the size of the incident slit aperture and aperture, the luminous flux is limited and the efficiency is ...

AI Technical Summary

Problems solved by technology

This kind of spectrometer uses time modulation to realize the modulation of optical signals, and multiple localized interference fringes are sequentially formed at the receiving point of the detection system; the moving mirror as a mirror requires a high-precision drive system, and the repeatability and reliability of the system It is difficult to guarantee the performance and the real-time performance of the measurement is poor. The mechanism of this kind of spectrometer is relatively complicated and the volume is large.

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