Micro Fourier transform spectrometer

A Fourier transform and spectrometer technology, applied in the field of spectrometer, can solve the problems of difficulty in guaranteeing repeatability and reliability, complex spectrometer mechanism, poor real-time measurement, etc., and achieve the effect of light weight, high repeatability, and guaranteed accuracy

Active Publication Date: 2013-10-09
无锡微文半导体科技有限公司
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Problems solved by technology

This kind of spectrometer uses time modulation to realize the modulation of optical signals, and multiple localized interference fringes are sequentially formed at the receiving point of the detection system; the moving mirror as a mirror requires a high-precision drive system, and the repeatability and reliability of the system It is difficult to guarantee the performance and the real-time performance of the measurement is poor. The mechanism of this kind of spectrometer is relatively complicated and the volume is large.

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Embodiment Construction

[0026] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0027] Such as Figures 1 to 5 As shown, a micro-Fourier transform spectrometer includes a light source 1 and an interference system. The interference system includes a first beam splitter 5, a moving mirror 7, and a fixed mirror 6. The light beam emitted by the light source 1 is irradiated on the first beam splitter 5. The first beam splitter 5 divides the beam into two paths, one of which is irradiated to the moving mirror 7, and the other is irradiated to the fixed mirror 6, and the two beams of light reflected by the moving mirror 7 and the fixed mirror 6 are reflected on the first beam splitter 5 to form interference optical path, and produce interference fringes, wherein, the moving mirror 7 is a MEMS micromirror, and the fixed mirror 6 is a MEMS micromirror or a plane mirror. When the fixed m...

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Abstract

The invention discloses a micro Fourier transform spectrometer comprising a light source and an interference system, wherein the interference system comprises a first beam splitter mirror, a movable mirror and a fixed mirror, a light beam emitted by the light source irradiates onto the first beam splitter mirror, the first beam splitter mirror divides a light beam into two paths, one path of the light beam irradiates the movable mirror, the other path of the light beam irradiates the fixed mirror, two light beams reflected by the movable mirror and the fixed mirror are reflected onto the first beam splitter mirror to form interference light paths and generate interference fringes, the movable mirror is an MEMS (Micro-electromechanical Systems) micro-mirror, the fixed mirror is an MEMS micro-mirror or a plane mirror, and if the fixed mirror is the MEMS micro-mirror, the fixed mirror generates displacement so as to perform phase modulation. The micro Fourier transform spectrometer disclosed by the invention is accurate in precision and small in volume.

Description

technical field [0001] The invention belongs to the technical field of spectrometers and relates to a miniature Fourier transform spectrometer. Background technique [0002] Spectroscopic instruments are powerful tools for analyzing the composition and structure of substances. They can be used for qualitative and quantitative analysis of samples. The requirements of online real-time monitoring and portability in the field and industry promote the development of miniaturization of spectroscopic instruments, and have a broad application space. However, the traditional Fourier transform spectrometer is bulky and expensive, which is not conducive to the popularization of products. [0003] In recent years, research on miniaturized spectrometers has progressed very rapidly. Most of the existing miniature spectrometers still use the principle of classical spectrometers. Due to the size of the incident slit aperture and aperture, the luminous flux is limited and the efficiency is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/45
Inventor 王元光谢会开陈巧兰树明王东琳周正伟
Owner 无锡微文半导体科技有限公司
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