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Gyro sensor, electronic apparatus, and mobile unit

A gyro sensor and moving body technology, applied in gyroscope/steering sensing equipment, steering sensing equipment, gyro effect for speed measurement, etc., can solve problems such as hindering the exchange of vibration energy, and achieve the suppression of the influence of torsional mode and the suppression of in-phase Influence of mode, effect of preventing sticking

Inactive Publication Date: 2013-10-23
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in such a structure, when the driving system composed of two vibrating bodies vibrates in antiphase, the holder will hinder the exchange of vibration energy between each other.

Method used

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  • Gyro sensor, electronic apparatus, and mobile unit
  • Gyro sensor, electronic apparatus, and mobile unit
  • Gyro sensor, electronic apparatus, and mobile unit

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment ］

[0182] As the simulation conditions related to the first embodiment, it is assumed that the elastic body 28 is equipped with Figure 4 In the gyro sensor 101 of the shown form, the simulation is performed by assuming that each spring portion 3 has 3 turns (3 turns) and the connecting spring portion 26 has 6 turns (6 turns). In this form, the vibration frequency f is 4.7 kHz.

[0183] In the first embodiment, the length of the elastic body 28 was uniformly 100 μm, and the width was changed to 12 μm, 6 μm, 3 μm, 1 μm, 0.12 μm, and 0.01 μm, and simulations were performed under each condition.

[0184] Table 1 shows simulation results for each width in the first embodiment.

[0185] 【Table 1】

[0186]

[0187] in addition, Figure 13 is a graph showing the simulation results related to the first example. Figure 13 (a) shows the simulation results when the width is set to 12 μm, Figure 13 (b) shows the simulation results when the width is set to 6 μm, Figure 13 (c) show...

no. 2 Embodiment ］

[0192] As the simulation conditions related to the second embodiment, it is assumed that Figure 4 The elastic body 328 of the gyro sensor 105 is applied to the gyro sensor 101 of the shown form, and a simulation is performed by setting each spring portion 30 to have 3 turns, the connection spring portion 26 to have 6 turns, and the elastic body 328 to have 5 turns. In this form, the vibration frequency f is 4.7kHz.

[0193] In the second example, the simulation was performed under the condition that the width of the elastic body 328 was 4 μm and the length was 100 μm.

[0194] Figure 15 is a graph showing the simulation results related to the second example. The horizontal axis is frequency (Hz), and the vertical axis is displacement (dBm). Figure 15 The scale of the vertical axis in the upper figure is the absolute value, and the vertical axis in the lower figure is the logarithmic scale after the logarithmic transformation of the displacement. below, in Figure 16 ~ ...

no. 3 Embodiment ］

[0197] As the simulation conditions related to the third embodiment, it is assumed that Figure 4 In the gyro sensor 101 of the shown form, the elastic body 328 of the gyro sensor 105 is applied, and a simulation is performed by setting the number of turns of each spring part 30 to 6 turns, the number of turns of the connecting spring part 26, and the number of turns of the elastic body 328 to 5 turns. . The vibration frequency f in this form is 4.0 kHz.

[0198] In the third example, the simulation was performed under the condition that the width of the elastic body 328 was 4 μm and the length was 100 μm.

[0199] Figure 16 It is a figure which shows the simulation result concerning 3rd Example. like Figure 16 As shown, the frequency difference Δf between the in-phase mode and the anti-phase mode is 0.85kHz. Therefore, by providing the elastic body 328 whose length L can be set longer than that of the second embodiment, it is possible to separate the frequency of the i...

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Abstract

A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.

Description

technical field [0001] The present invention relates to a gyro sensor, electronic equipment, and a mobile body. Background technique [0002] In recent years, gyro sensors (capacitive MEMS gyro sensor elements) that detect angular velocity using, for example, silicon MEMS (Micro Electro Mechanical System) technology have been developed. For example, Patent Document 1 discloses a gyro sensor including a drive system in which two vibrating bodies (movable structures) are connected by springs and vibrates the vibrating bodies (also referred to as tuning fork vibration). [0003] When manufacturing such a gyro sensor, microfabrication techniques such as wet etching are used to prepare silicon structures one by one from a silicon substrate placed on a base for manufacturing. The vibrating body constitutes. Next, the gyro sensor having the above-mentioned structure can be manufactured by connecting the connecting springs to each other. [0004] However, in the above-mentioned m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5755
CPCG01C19/5747G01C19/56
Inventor 古畑诚
Owner SEIKO EPSON CORP
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