Soft terahertz wave modulator

A terahertz and modulator technology, which is applied in the fields of terahertz wireless communication, detection and imaging, can solve the problems of compatibility between organic functional layer materials and flexible substrate CMOS processes, inability to achieve flexibility and bendability, and achieve the effect of operability.

Inactive Publication Date: 2013-10-23
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, there are few reports on flexible terahertz modulators, mainly because organic functional layer materials and flexible substrates are generally not compatible with CMOS processes, and are generally prepared on non-flexible substrates, which cannot achieve flexible and bendable effects.

Method used

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Embodiment Construction

[0020] Such as figure 1 As shown, the present invention includes a dielectric substrate 1 and an electromagnetic resonator array 2 attached to the surface of the dielectric substrate 1. The dielectric substrate 1 is a flexible dielectric material substrate, and the flexible dielectric material is a polycrystalline material that is highly transparent to terahertz waves. Imide, referred to as PI. The electromagnetic resonator array 2 is composed of 10×10 electromagnetic resonator units, each electromagnetic resonator unit has a diameter of 50 μm, and the lateral and longitudinal spacing of the electromagnetic resonator units is 50 μm. The electromagnetic resonance unit is composed of VO deposited on the surface of the dielectric substrate 1 2 Or V 2 O 5 The nano-film is formed, and the thickness of the film is 100-600nm.

[0021] The following is a further description of the preparation process and test analysis of the flexible terahertz modulator:

[0022] Step 1: Clean the flexibl...

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Abstract

The invention discloses a soft terahertz wave modulator which comprises a dielectric substrate (1) and an electromagnetic resonator array (2) adhered to the surface of the dielectric substrate (1), wherein the dielectric substrate (1) is made from a soft dielectric material-polyimide, called PI for short; the electromagnetic resonator array (2) comprises a plurality of electromagnetic resonator units; each electromagnetic resonator unit is formed by a VO2 or V2O5 nanofilm deposited on the surface of the dielectric substrate (1); and the thickness of each nanofilm is 100-600 nm. The invention provides a novel soft substrate-based terahertz wave modulator which is simple to manufacture, easy to control, stable, reliable and low in luminous power, and an application basis is provided for a novel soft substrate integrated circuit device.

Description

Technical field [0001] The invention belongs to the fields of terahertz wireless communication, detection and imaging, and in particular relates to a flexible terahertz wave modulator. Background technique [0002] Terahertz (THz) waves (electromagnetic waves with frequencies in the 0.1-10THz band) are at a special position between millimeter waves and infrared rays, and are the last empty band in the electromagnetic spectrum. Compared with electromagnetic waves of other wavebands, terahertz waves have the characteristics of low photon energy and strong penetrating power, which have brought far-reaching influence to the fields of communications, military, security inspection, and medicine. To promote the further development and practical application of terahertz technology, it is not only necessary to provide a good solution to reliable and stable THz sources, high sensitivity and high signal-to-noise ratio THz detectors, but also to provide high-performance, highly integrated, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/09
Inventor 胡明韦晓莹武雅乔夏晓旭朱乃伟
Owner TIANJIN UNIV
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