Stick-slip driving cross-scale precise motion platform

Abstract

The invention discloses a stick-slip driving cross-scale precise motion platform which comprises a base, a friction vibrator, a vibrator driving source and a sliding block, wherein the friction vibrator is mounted on the base; the vibrator driving source is mounted between the friction vibrator and the base and provides a driving force for the friction vibrator; the sliding block is connected with the friction vibrator in a sleeving manner, and contacted with the friction vibrator to generate a friction force; a pretightening force adjustment structure for providing a pretightening force is arranged between the side surface of the sliding block and the base, and used for adjusting the magnitude of the friction force; a stick-slip effect is generated between the sliding block and the friction vibrator; and the sliding block makes cross-scale precise motion. According to the stick-slip driving cross-scale precise motion platform, an adjustment mode of the pretightening force of the motion platform is simplified greatly; processing and assembling are facilitated; the output performance of the stick-slip driving cross-scale precise motion platform is further improved effectively; the motion precision and the consistency of the stick-slip driving cross-scale precise motion platform can be guaranteed simply and effectively; and the stick-slip driving cross-scale precise motion platform is suitable for mass production.

Description

technical field [0001] The invention belongs to the technical field of precision motion, and in particular relates to a cross-scale precision motion platform driven by stick-slip. Background technique [0002] Cross-scale precision motion technology with nanometer-level motion resolution and millimeter-level motion travel is the key technology in the field of micro-drives. Compared with other types of cross-scale motion driving methods, the stick-slip drive is simple, convenient, and easy to control, and has the advantages of large motion range, high resolution, simple structure, easy miniaturization, and precise positioning. A method that is widely used in the current cross-scale drive. The working principle of the stick-slip drive is mainly based on the friction force as the driving source, and uses the stick-slip effect to realize the tiny movement of the driven body. The difference between the forces is used to achieve precise motion across scales. In the stick-slip d...

AI Technical Summary

Problems solved by technology

For the upper and lower spring preloaded stick-slip drive cross-scale precision motion platform, the related public technology has the publication number or patent number of WO2009043421A1, US6940210B2, US7579752B2, US20080148589A1 and other patents. Its working principle is mainly to divide the motion platform into upper and lower parts. The tension spring is used to adjust the friction force between the upper and lower parts and the friction vibrator. The tension spring adjusts the pre-tightening force through the thread structure, and the guiding is realized by the diamond-shaped friction surface. The adjustment range of the friction pre-tightening force is relatively small. Difficulty adapting to small differences in frictional interfaces

[0004] Although the above three kinds of stick-slip drive cross-scale precision motion platforms are different in the friction preload structure and adjustment methods, the common point of the three types is that the friction force preload structure and adjustment methods are all too complicated to set. It will lead to limited adjustment of the friction force of the contact interface between the stick-slip friction vibrator and the motion platform, the friction adjustment range is small, and the processing accuracy of the friction interface is high, which in turn leads to the processing and assembly accuracy requirements of the stick-slip drive platform Higher, which will ultimately affect the motion accuracy and consistency of the cross-scale precision motion platform, so these existing technologies have technical problems such as complex manufacturing process and high manufacturing cost in ensuring the consistency of mass production of the cross-scale precision motion platform

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