Fresnel prism phase retarder for double-rotation compensator ellipsometer

A dual-rotation compensator and phase retarder technology is applied in the field of ellipsometer to achieve the effects of reduced difficulty, reduced processing and installation difficulty, and insensitive beam incident angle

Active Publication Date: 2013-12-04
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
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Problems solved by technology

[0007] Aiming at the above defects or improvement needs of the prior art, the present invention provides a Fresnel prism phase retarder for a double-rotating compensator ellipsometer, the purpose of which is to symmetrically combine two

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  • Fresnel prism phase retarder for double-rotation compensator ellipsometer
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  • Fresnel prism phase retarder for double-rotation compensator ellipsometer

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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. The description herein is only used to explain the present invention when referring to specific examples, and does not limit the present invention.

[0029] The Fresnel phase retarder of this embodiment is formed by splicing and combining two identical rhombic prisms 1 and 2, wherein an inclined bottom 15 of the rhomboid prism 1 and an inclined bottom 16 of the rhomboid prism 2 are fitted and matched , so that the two prisms form a symmetrical structure at a certain angle.

[0030] The incident polarized light beam 4 is vertically incident on the face 13 of the first rhombic prism 1 and undergoes total reflection for the first time on the prism face 9, and the reflected light beam 5 continues to propagate, and then the second total reflection occurs on the prism fac...

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Abstract

The invention discloses a Fresnel prism phase retarder for a double-rotation compensator ellipsometer. The Fresnel prism phase retarder consists of two rhombic prisms, and oblique bottom surfaces of one ends of the two rhombic prisms are bound to each other to form a symmetrical structure. The prism materials with corresponding refractive index are selected and oblique angles of the rhombic prisms are determined, an incident beam is emitted into the rhombic prism perpendicularly through the oblique bottom surface of the other end of one of the rhombic prisms, subjected to total reflection twice sequentially through the opposite two sides, emitted into the other rhombic prism through the binding surface of the two rhombic prisms, and further, subjected to total reflection twice through the two sides of the rhombic prism sequentially so as to be emitted out, so that the phase retardation required by the double-rotation compensator Mueller matrix type ellipsometer can be acquired. The phase retarder has good achromatism within bands of ultraviolet light, visible light and infrared light, is insensitive to the incident angle of the light beam, is convenient to process, can be used as a rotary compensator of the double-rotation compensator Mueller matrix type ellipsometer, and can meet the requirements of the double-rotation compensator Mueller matrix type ellipsometer to the broad spectrum band and the 127-degree phase retardation.

Description

technical field [0001] The invention belongs to the technical field of ellipsometers, and in particular relates to a Fresnel prism phase retarder used for double-rotating compensator ellipsometers. Background technique [0002] Ellipsometry is an optical method to study the phenomena and characteristics of the interface or film between two media. Its principle is to use the polarization transformation that occurs when the polarized beam is reflected or transmitted on the interface or film, including phase difference and amplitude ratio. Ellipsometer (referred to as ellipsometer) is a general-purpose optical measuring instrument developed by using ellipsometry technology. The basic principle is to project special elliptically polarized light onto the surface of the sample to be measured through a polarizer, and measure the reflected light (or transmitted light) of the sample to obtain the polarization state change of the polarized light before and after reflection (or transm...

Claims

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Application Information

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IPC IPC(8): G02B27/28G01N21/21
Inventor 刘世元谷洪刚张传维陈修国
Owner HUAZHONG UNIV OF SCI & TECH
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