Pressure sensitive core with thermistor

A technology of thermistors and sensitive resistors, which is applied in the direction of fluid pressure measurement, fluid pressure measurement, and measurement devices by changing ohmic resistance, and can solve problems such as limited compensation capabilities

Inactive Publication Date: 2013-12-18
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the compensation ability of this method is limited. In order to further improve the compensation accuracy, a quantity that is nonlinear with the temperature is needed to participate in the compensation.

Method used

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  • Pressure sensitive core with thermistor
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Embodiment Construction

[0023] A pressure sensitive core with a thermistor, such as figure 1 As shown, the silicon-based pressure-sensitive chip 1 and the NTC thermistor 2 are bonded on the tube base 4 through the adhesive 3, and the bottom of the tube base 4 is packaged with a corrugated diaphragm 8, and the silicon-based pressure-sensitive chip 1 and the NTC thermistor 2 pass through The gold wire 5 is electrically connected to the Kovar pin 6, wherein the silicon-based pressure sensitive chip 1 is electrically connected to the five Kovar pins 6 respectively, and the NTC thermistor 2 is electrically connected to the two Kovar pins 6 The diameter of the tube base 4 is Φ15.6mm, the tube base 4 is filled with silicone oil 7, and the corrugated diaphragm 8 seals the silicone oil 7 and isolates the external medium. Said gluing way finally forms the thickness of the rubber compound which is less than 0.2mm. The silicon-based pressure-sensitive chip is a commercially available product, such as the MEMS s...

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Abstract

The invention discloses a pressure sensitive core with a thermistor, and belongs to the field of pressure measurement. In order to solve the problem that an existing silicon piezoresistive pressure sensor is large in temperature excursion, the pressure sensitive core with the thermistor comprises a tube base with an inner cavity, a pressure sensitive chip and the thermistor, wherein the pressure sensitive chip and the thermistor are installed in the inner cavity of the tube base. A plurality of pins are installed on the tube base, the pressure sensitive chip is electrically connected with a part of pins, the thermistor is electrically connected with the other part of pins. A corrugated diaphragm is arranged at the bottom of the tube base, a closed cavity is formed between the corrugated diaphragm and the tube base, and silicon oil is contained in the closed cavity. The pressure sensitive core with the thermistor solves the problem that the temperature excursion of the pressure sensor can not be compensated for with high precision when a pure-resistance network is adopted, the NTC thermistor provides signal output in nonlinear relation with temperature, and the nonlinear output signal can compensate for the temperature excursion of the pressure sensitive chip with high precision.

Description

technical field [0001] The invention relates to the field of pressure sensing, in particular to a pressure sensitive core body with a thermistor, which is especially suitable for pressure measurement with wide temperature range and low temperature drift. Background technique [0002] The biggest disadvantage of silicon-based pressure sensors is the large temperature drift. At present, there are many methods for temperature compensation of silicon-based pressure sensors, one of which is the resistance network compensation method, which reduces the temperature drift of the pressure sensor by connecting resistors in series and parallel, and the temperature coefficient of the resistance used for compensation is small, even if the compensation resistance and Pressure-sensitive chips are not in the same temperature field, and can effectively compensate for temperature drift. However, this method has a limited compensation capability, and in order to further improve the compensati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/02G01L19/04
Inventor 金忠陈云锋谢利华谢锋龙悦王勋志潘喜成章良宋祖殷
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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