PM2.5 (Particulate Matter 2.5) detection device and manufacturing method thereof

Abstract

The invention relates to a PM2.5 (Particulate Matter 2.5) detection device and a manufacturing method of the PM2.5 detection device. The PM2.5 detection device comprises a particle separation mechanism for filtering and removing particles with the size more than 2.5 microns in needed quantitative air and a PM2.5 detection mechanism for carrying out detection on the content of PM2.5 in the quantitative air, wherein an outlet end of the particle separation mechanism is connected with an inlet end of the PM2.5 detection mechanism; the PM2.5 detection mechanism comprises a detection cavity; a detection light source and a light detector are arranged on the outer side of the detection cavity; light emitted by the detection light source enters the detection cavity through a light incidence window on the detection cavity; the light detector is used for receiving emergent light absorbed and scattered by PM2.5 particles of the detection cavity by a light emergent window on the detection cavity; the light detector is used for determining and outputting the concentration value of the PM2.5 according to the strength of the emergent light. The PM2.5 detection device is compatible with a conventional MEMS (Micro-electromechanical Systems) process; the process is simple and convenient, the precision and the effectiveness of the PM2.5 detection can be improved, and a miniaturized structure enables the PM2.5 detection device to have the characteristics of portability and real-time detection; the PM2.5 detection device is wide in applicable range and is safe and reliable.

Description

technical field [0001] The invention relates to a detection device and a manufacturing method, especially a PM2.5 detection device and a manufacturing method thereof, specifically a PM2.5 detection device based on optical detection technology and a manufacturing method thereof, belonging to MEMS and environmental The technical field of science. Background technique [0002] PM2.5 refers to particulate matter with a diameter less than or equal to 2.5 μm in the atmosphere, also known as particulate matter that can enter the lungs. Although PM2.5 is only a small component of the earth's atmospheric composition, it has an important impact on air quality and visibility. PM2.5 has a small particle size, contains a large amount of toxic and harmful substances, stays in the atmosphere for a long time, and is transported over a long distance, so it has a great impact on human health and the quality of the atmospheric environment. [0003] Meteorologists and medical experts believe ...

AI Technical Summary

Problems solved by technology

The collection processes of the above three methods all rely on PM2.5 cutters, samplers, and filter membranes, but the existing equipment generally has the disadvantages of large volume, high power consumption, high price, and non-portability. The filtration effect of particles is completely determined by the pore size of the filter membrane

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