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Rolled film formation apparatus

A film forming device and the technology of the film device, which are applied in the directions of winding strips, transportation and packaging, gaseous chemical plating, etc., can solve the problems of inability to form films and limited productivity, and achieve the effect of continuous formation.

Active Publication Date: 2013-12-18
TOPPAN PRINTING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Conventionally, the film deposition process has been performed in batches, and in order to increase productivity, a device that processes multiple Si wafers at the same time is being developed, but its productivity is limited.
[0008] In addition, in the above-mentioned batch processing equipment, it is not possible to continuously perform film formation on a rollable substrate.

Method used

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Experimental program
Comparison scheme
Effect test

no. 1 approach ］

[0110] The roll-to-roll film forming apparatus according to the first embodiment of the present invention is shown in figure 1 .

[0111] The roll-to-roll deposition apparatus 1 according to the first embodiment of the present invention includes: a first vacuum chamber that is a first region 21 into which a first precursor gas is introduced; a second vacuum chamber that is a second region 22 into which a second precursor gas is introduced; And the third vacuum chamber that introduces the purge gas, that is, the third region 23 .

[0112] The roll-to-roll film forming device 1 is equipped with: an unwinding roller 11 arranged in the unwinding chamber 13; a winding roller 12 arranged in the winding chamber 14; 15 handling equipment 41a, 41b.

[0113] The transport devices 41a and 41b in the first embodiment of the present invention are clamps that transport the rollable base material 15 in a state where both ends in the width direction of the rollable base material 15 are clam...

no. 2 approach ］

[0164] A roll-to-roll film forming apparatus according to a second embodiment of the present invention is shown in image 3 .

[0165] Similar to the roll-to-roll deposition apparatus 1 of the first embodiment of the present invention, the roll-to-roll deposition apparatus 2 of the second embodiment of the present invention includes: a first vacuum chamber, namely a first region 21, into which a first precursor gas is introduced; The second vacuum chamber, that is, the second region 22 , into which the second precursor gas is introduced; and the third vacuum chamber, that is, the third region 23 , into which the purge gas is introduced.

[0166] The film forming apparatus 2 is provided with: an unwinding roll 11 arranged in the unwinding chamber 13; a winding roll 12 arranged in the winding chamber 14; The handling equipment 51.

[0167] It should be noted that the configuration of the roll-to-roll film deposition apparatus 2 is the same as that of the roll-to-roll film deposi...

no. 3 approach ］

[0176] A roll-to-roll film forming apparatus according to a third embodiment of the present invention is shown in Figure 5 .

[0177] Similar to the roll-to-roll deposition apparatus 1 of the first embodiment of the present invention, the roll-to-roll deposition apparatus 3 of the third embodiment of the present invention includes: a first vacuum chamber that introduces a first precursor gas, that is, a first region 21; The second vacuum chamber, that is, the second region 22 , into which the second precursor gas is introduced; and the third vacuum chamber, that is, the third region 23 , into which the purge gas is introduced.

[0178] The film forming device 3 is provided with: an unwinding roll 11 arranged in the unwinding chamber 13; a winding roll 12 arranged in the winding chamber 14; The handling equipment 61.

[0179] It should be noted that the configuration of the roll-to-roll film forming apparatus 3 is the same as that of the roll-to-roll film forming apparatus 1...

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Abstract

This rolled film formation apparatus (1) is provided with: a first vacuum chamber (21) into which a first precursor gas is introduced; a second vacuum chamber (22) into which a second precursor gas is introduced; a third vacuum chamber (23) into which a purge gas, used in discharging the first precursor and the second precursor, is introduced; and a conveyance mechanism (41a(41b)) which conveys a substrate (15), capable of being rolled up, to the first vacuum chamber (21), the second vacuum chamber (22), and the third vacuum chamber (23), and which has a holding unit for holding the substrate (15) at both ends in the width direction.

Description

technical field [0001] The present invention relates to a roll-to-roll film-forming device that adopts an atomic layer deposition method in which atomic layers are deposited continuously on the surface of a rollable flexible base material to form a film. [0002] This application claims the priority of Japanese Patent Application No. 2011-072141 filed on March 29, 2011 and Japanese Patent Application No. 2011-210048 filed on September 27, 2011, the contents of which are incorporated herein by reference. Background technique [0003] In the past, the following film formation technology has been known: rewinding a long rollable substrate such as paper or plastic film in vacuum, and then using a film formation method such as vapor deposition or sputtering to coat metal or metal oxide, etc. Continuous film formation. This technology is used as a method for producing optical films such as metallic luster films used in metallic filaments, gas barrier films for food packaging, ele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/54
CPCC23C16/45551B65H20/16B65H23/025C23C16/545C23C16/54
Inventor 加纳满佐佐木康裕
Owner TOPPAN PRINTING CO LTD
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