Method for determining base sequence of polynucleotide and device for determining base sequence of polynucleotide
A base sequence and polynucleotide technology, applied in the field of determining the base sequence of polynucleotides and devices for determining the base sequence of polynucleotides, can solve problems such as system instability and limited pore size selection
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[0265]
[0266] Formed using nanofabrication mechanically controlled junction breaking (MCBJ) figure 1 The electrode pair shown (cf. Tsutsui, M., Shoji, K., Taniguchi, M. Kawai, T., Formation and self-breaking mechanism of stableatom-sized junctions. Nano Lett. 8, 345-349 (2007)). Hereinafter, a method for producing the electrode pair will be briefly described.
[0267] Using an electron beam lithography apparatus (manufactured by JEOL Ltd., catalog number: JSM6500F), standard electron beam lithography and lift-off techniques were performed on polyimide (manufactured by Industrial Summit Technology, catalog number: Pyre-Ml) package. Nanoscale gold joints are patterned on a covered flexible metal substrate (phosphor bronze substrate).
[0268] Next, the polyimide located below the joint was removed by etching by a reactive ion etching method using a reactive ion etching apparatus (manufactured by Sumko Corporation, catalog number: 10NR). Then, the substrate was bent to fabr...
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