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Array substrate, manufacturing method thereof, and display device

An array substrate and substrate technology, which is applied in the field of display preparation, can solve the problem of a large number of masks, and achieve the effects of reducing manufacturing costs, reducing exposure times, and improving production efficiency

Active Publication Date: 2016-01-20
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Aiming at the shortcomings of the prior art, the present invention provides an array substrate, a manufacturing method thereof, and a display device including the array substrate in order to solve the problem of using more masks in the preparation of the array substrate in the prior art.

Method used

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  • Array substrate, manufacturing method thereof, and display device
  • Array substrate, manufacturing method thereof, and display device
  • Array substrate, manufacturing method thereof, and display device

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Embodiment Construction

[0056] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0057] The technical solution adopted in the present invention is mainly to realize the preparation of the array substrate through the multi-tone mask (MTM, MultiToneMask) and photoresist liftoff technology, which reduces the number of masks used in the production process, Further, the effect of reducing the process cost and improving the utilization rate of products and equipment is realized.

[0058] First, if figure 1 In the planar structure shown...

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Abstract

Embodiments of the present invention provide an array substrate, a manufacturing method thereof, and a display device. The array substrate comprises: a pixel region, a data-line pad region and a gate-line pad region; the pixel region comprises: a pixel electrode, a gate electrode of a TFT, source and drain electrodes of the TFT, a connection electrode, and a common electrode; the data-line pad region comprises: an insulating layer, a semiconductor layer, a data line, and a data-line connection pad; the data line and the source and drain electrodes are of a same layer and a same material; and the gate-line pad region comprises: a gate line, an insulating layer, and a gate-line connection pad; the gate line and the gate electrode are of a same layer and a same material; and the gate-line connection pad and the source and drain electrodes are of a same layer and a same material. The array substrate can reduce the number of masks and exposure times, thereby reducing manufacturing costs and improving production efficiency.

Description

technical field [0001] The invention relates to the field of display preparation, in particular to an array substrate, a manufacturing method thereof, and a display device including the array substrate. Background technique [0002] In recent years, the display technology has developed rapidly, and the flat panel display is very different from the traditional video image display with its completely different display and manufacturing technology. The characteristics of flat panel display, such as complete planarization, lightness, thinness, and power saving, are in line with the inevitable trend of future image display development. At present, the main flat-panel displays include: Thin Film Transistor Liquid Crystal Display (TFT-LCD for short), Plasma display panel (Plasma display panel), Organic light-emitting diode displays (Organic light-emitting diode displays) and the like. [0003] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/02H01L21/77G02F1/1362G02F1/1368
CPCH01L27/1288G02F1/13458G02F1/136286G02F1/1368H01L27/1214H01L27/124H01L27/144
Inventor 吴松
Owner BOE TECH GRP CO LTD