Graphite boat cleaning process

A graphite boat and process technology, applied in the field of graphite boats, can solve the problems of difficulty in controlling the thickness of the film layer, reducing the service life of graphite boats, and increasing the number of color difference sheets, so as to reduce the proportion of defective products, improve production capacity and efficiency, and solve technical problems Effect

Inactive Publication Date: 2014-01-22
NINGXIA YINXING ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

The cleaning effect of the graphite boat affects the effect of the tubular PECVD coating to a considerable extent.
If the graphite boat cannot be cleaned well, it will lead to more aberration sheets, and even the thickness of the film layer is difficult to control, which will seriously affect the production capacity and benefit
[0003] Since there is currently no special cleaning equipment and process standards for cleaning graphite boats, some small and medium-sized cell manufacturers in China still use soaking in acid for more than 20 hours and washing with water for more than 12 hours before cleaning. The cleaning effect of the boat is poor, the efficiency is low, and the graphite boat is easily damaged after being soaked in the acid for a long time, which greatly reduces the service life of the graphite boat

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] (1) Dosing: prepare hydrofluoric acid with a volume concentration of 20%;

[0020] (2) Pickling: Soak the graphite boat in the prepared hydrofluoric acid for 8 hours, set the bubbling for 10 minutes every hour during the pickling process, and set the bubbling gas pressure to 0.2Mpa, which requires manual operation of the cleaning machine Bubbling button; Compared with most current processes that use acid soaking for more than 20 hours, this pickling process can greatly increase the life of the graphite boat and the coating effect of the silicon wafer, and at the same time reduce the pickling time by more than 12 hours, greatly improving production efficiency;

[0021] (3) Water washing: Soak the graphite boat in water for 6 hours, keep bubbling during soaking, and change the water every 1 hour;

[0022] (4) Rinse: Rinse the entire graphite boat with a high-pressure water gun;

[0023] (5) Purge: use N 2 Sweep the moisture on the surface of the graphite boat once to av...

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PUM

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Abstract

The invention relates to graphite boats used in a coating process in silicon solar cell manufacturing, in particular to a graphite boat cleaning process. The graphite boat cleaning process is characterized by including the following steps of (1) solution preparation: preparing hydrofluoric acid 20-25% in volume concentration; (2) acid pickling: soaking a graphite boat in the prepared hydrofluoric acid for 8-10 hours, setting bubbling for 8-10 minutes every an hour, and setting bubbling gas pressure to be 0.2-0.4Mpa; (3) washing: soaking the graphite boat in water for 6-8 hours, continuing bubbling during soaking, and changing the water for one time every 60-70 minutes; (4) rinsing: rinsing the whole graphite boat once with a high-pressure water gun; (5) blowing: blowing surface moisture of the graphite boat once with N2; (6) drying: placing the graphite boat in a drying oven for drying at the set temperature of 100-120 DEG C for 8-10 hours. By the adoption of the process technology, coating qualified rate is increased effectively.

Description

technical field [0001] The invention relates to a graphite boat used in the coating process in the manufacture of silicon solar cells, in particular to a cleaning process for the graphite boat. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition method) is an indispensable part of the silicon solar cell manufacturing process. With the continuous improvement of PECVD technology, tubular PECVD has significantly improved the efficiency of solar cells. . The cleaning effect of the graphite boat affects the effect of the tubular PECVD coating to a considerable extent. If the graphite boat cannot be cleaned well, it will lead to more aberration sheets, and even the thickness of the film layer is difficult to control, which will seriously affect the production capacity and efficiency. [0003] Since there is currently no special cleaning equipment and process standards for graphite boat cleaning, some domestic ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/04B08B3/08B08B3/10B08B3/02
CPCB08B3/04B08B3/02B08B3/08B08B3/10
Inventor 徐云飞常松山丁钧孙樵纪牟赫
Owner NINGXIA YINXING ENERGY
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