Single-package dynamic air distributing device

Abstract

The invention discloses a single-package dynamic air distributing device which comprises feed gas mass flow controllers, a diluent gas mass flow controller and a mixer. An outlet of the diluent gas mass flow controller is connected with an inlet of the mixer, and the single-package dynamic air distributing device further comprises a feed gas input ball valve and a feed gas output ball valve. The feed gas input ball valve and the feed gas output ball valve both are multi-way ball valves, the number of the feed gas mass flow controllers is at least two, the measuring ranges of the feed gas mass flow controllers increase in equal ratio, the common ratio of equal ratio is not smaller than 5, feed gas is input to the feed gas mass flow controllers through the feed gas input ball valve, and the feed gas mass flow controllers are connected with the inlet of the mixer through the feed gas output ball valve. According to the single-package dynamic air distributing device, a wide dilution ratio range is provided, feed gas of one concentration can be used for preparing standard gas meeting requirements of most instruments to be detected, storage and use of the feed gas are reduced, a connector does not need to be mounted and dismounted, airflow leakage and diffusion interference can be avoided, and the single-package dynamic air distributing device has the advantages of being convenient to use, flexible in allocation, and the like.

Description

technical field [0001] The invention relates to the technical field of gas distribution devices, in particular to a single-component dynamic gas distribution device. Background technique [0002] When calibrating, calibrating and inspecting gas analyzers, it is necessary to use standard gases of various components and concentrations according to the specific parameters of the instrument to be tested. The standard gases are usually prepared by dynamic gas distribution method. The serial dilution method is an important method in the dynamic gas distribution method. Its principle is to divide the known concentration of raw gas (which can be one or a variety of non-reactive species) and dilution gas (also known as zero gas) respectively. A new standard gas is prepared by mixing and diluting at a certain flow rate. The concentration of each component of the output standard gas can be calculated by multiplying the concentration of the raw material gas by the dilution ratio (the di...

AI Technical Summary

Problems solved by technology

This method requires various concentrations of raw material gas, which makes the preparation and storage of raw material gas inconvenient, and may cause waste

Moreover, it is necessary to disassemble and reinstall the gas line joint every time the raw gas is replaced, which is extremely inconvenient to operate, and multiple disassembly and assembly may easily lead to air leakage

[0006] When it is necessary to use the same gas distribution device to prepare standard gas of different components to test different gas analysis instruments, the raw material gas will also be replaced, requiring multiple disassembly and assembly of joints, resulting in cumbersome operations

[0007] The existing gas distribution device also ignores the problem of the dead volume of the gas path and the interference of the MFC leakage airflow on the output

Especially when it is necessary to output clean dilution gas for instrument zero adjustment, the leakage gas flow from the raw gas MFC or the components in the raw gas pipeline connected to the mixer will enter the dilution gas, resulting in the output of the dilution gas is not pure enough, which is harmful to The inspection of highly sensitive instruments causes a lot of interference

Images