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On-chip integrated body wave resonator and manufacturing method thereof

A technology of integrated body and manufacturing method, applied in electrical components, impedance networks, etc., can solve the problems of occupation, disadvantageous chip size miniaturization, reduction of bulk wave filter chip size, etc., to achieve the effect of reducing integration space and size

Active Publication Date: 2014-02-05
ROFS MICROSYST TIANJIN CO LTD
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  • Description
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Problems solved by technology

[0012] Aiming at the problem that the energy storage element in the bulk wave filter chip occupies an additional chip area in the related art, which is not conducive to further miniaturization of the chip size, the present invention proposes an on-chip integrated bulk wave resonator and its manufacturing method, which can store The energy components are integrated into the body wave resonator, which is beneficial to further reduce the size of the body wave filter chip

Method used

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  • On-chip integrated body wave resonator and manufacturing method thereof
  • On-chip integrated body wave resonator and manufacturing method thereof
  • On-chip integrated body wave resonator and manufacturing method thereof

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Embodiment Construction

[0064] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments of the present invention belong to the protection scope of the present invention.

[0065] According to an embodiment of the present invention, an on-chip integrated bulk wave resonator is provided.

[0066] A bulk wave resonator according to an embodiment of the present invention may include:

[0067] Bulk wave resonator;

[0068] At least one energy storage element, wherein the energy storage element may include capacitance and / or inductance or other energy storage elements for the bulk wave resonator, at least part of the at least one energy storage element is located in...

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Abstract

The invention discloses an on-chip integrated body wave resonator and a manufacturing method thereof. The body wave resonator comprises at least one energy storage element, wherein at least one part of the energy storage element is located within the projection area range of the body wave resonator in the vertical direction. According to the on-chip integrated body wave resonator, the energy storage element is integrated within the projection area range of the body wave resonator in the vertical direction, so integration space of the energy storage element and the body wave resonator can be effectively diminished, and reduction of the size of a chip of the body wave resonator is further facilitated.

Description

technical field [0001] The present invention relates to the field of semiconductors, and in particular, to an on-chip integrated bulk wave resonator and a manufacturing method thereof. Background technique [0002] In terms of mobile phone communication and high-speed serial data applications, thin-film piezoelectric bulk wave resonators made of piezoelectric thin-film longitudinal resonance in the thickness direction have become a viable alternative to surface acoustic wave devices and quartz crystal resonators. . The RF front-end bulk wave piezoelectric filter / duplexer provides superior filtering characteristics, including: low insertion loss, steep transition band, large power capacity, strong anti-electrostatic discharge (ESD) ability, etc. High-frequency thin-film piezoelectric bulk wave oscillators have ultra-low frequency temperature drift, and they have low phase noise, low power consumption, and large bandwidth modulation range. In addition, these miniature thin-f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/15H03H9/02H03H3/02
Inventor 庞慰江源张代化张浩
Owner ROFS MICROSYST TIANJIN CO LTD
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