Magnetic sensor chip, magnetic sensor and manufacturing method of magnetic sensor

Abstract

The invention provides a magnetic sensor chip, a magnetic sensor and a manufacturing method of the magnetic sensor. The magnetic sensor chip comprises at least one pair of independent magnetic-sensitive films. First electrodes used for being electrically connected with the magnetic-sensitive films are arranged on the end portions of the magnetic-sensitive films. The magnetic sensor chip is characterized in that in each pair of magnetic-sensitive films, at least one magnetic-sensitive film is electrically connected with an adjustable resistor through the first electrode at the end of the magnetic-sensitive film, the at least one magnetic-sensitive film, the first electrode and the adjustable resistor are electrically connected to form a Wheatstone bridge circuit, the adjustable resistor is used for adjusting the total resistance, in branches of the Wheatstone bridge circuit, of the adjustable resistor so as to enable counter-arm resistance in the Wheatstone bridge circuit to be mutually balanced. The magnetic sensor chip reduces magnetic-lag phenomena and improves the temperature excursion characteristic and the sensitivity.

Description

technical field [0001] The invention relates to a magnetic sensor chip, a magnetic sensor and a manufacturing method thereof. Background technique [0002] Magnetic changes easily caused by changes in magnetic field, current, stress and strain, temperature, light, etc., the magnetic properties of the sensitive unit will change with the magnetic changes, and small magnetic changes will cause changes in the magnetic properties of the sensitive unit. [0003] The magnetic sensor uses the sensitivity of the sensitive unit to the magnetic change to convert the magnetic property change of the sensitive unit into an electrical signal, and then obtains the corresponding physical quantities such as the magnetic field, current, stress and strain, temperature or light by measuring the electrical signal. [0004] With the advancement of technology, magnetic sensor chips with many advantages such as low power consumption, small size, fast response, high resolution, good stability, and hi...

AI Technical Summary

Problems solved by technology

Depend on figure 2 It can be seen that the width of the hysteresis loop of the magnetically sensitive thin film unit is larger, that is, the magnetic hysteresis of the magnetically sensitive thin film unit is larger

[0007] In addition, the resistance values ​​of the magnetically sensitive thin film units 11a and 11b will change with the temperature of the environment, and the amount of change is different due to the inhomogeneity of the manufacturing process, that is, the temperature drift of the magnetically sensitive thin film unit 11a and the magnetically sensitive thin film unit 11b The difference is large, which has a huge impact on the stability and temperature drift characteristics of the magnetic sensor, and at the same time reduces the sensitivity of the magnetic sensor

Images