Quality evaluation method of target assembly used in forming thin film for semiconductor layers of thin film transistor
A thin-film transistor and quality evaluation technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device testing/measurement, and material analysis using microwave means, can solve problems such as productivity and cost reduction, and achieve improved yield and shortened Period, the effect of productivity improvement
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[0039] (1) About the first embodiment
[0040] (First step)
[0041] First, like figure 1 and figure 2 As shown, a target assembly 21 in which a plurality of oxide target members 24 a to 24 d are arranged on the back plate 23 with a gap T through the bonding materials 31 a to 31 c is prepared. figure 1 and figure 2 The illustrated target assembly 21 includes: a sputtering target 22 formed by arranging four target members 24a-24d in front, back, left, and right, a back plate 23 for fixing (supporting) the sputtering target 22, and more The low-melting-point solder bonding materials 31a to 31c in which the target members 24a to 24d are joined to the back plate 3. A lining member 25 is provided on the back side (the low melting point solder bonding material 31a side) of the gap T between the adjacent target members 24a to 24d so as to close the gap T. A spacer 32 (Cu wire) is arranged between the target members 24a to 24d and the back plate 23 so as to form a uniform gap.
[0042] E...
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[0072] Example
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