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Test calibrator, test system and test method

A technology of a test system and a test method, which is applied in the field of test calibrator, can solve problems such as failure of test items, and achieve the effect of improving reliability

Active Publication Date: 2016-09-28
SINO IC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a test calibrator, test system and test method, to solve the problem that in the existing chip test, the performance and debugging state of the two test machines are all the same (that is, the test conditions output by the two test machines In the case of the same), the problem that the test item passed under the first test machine cannot be passed under the second test machine

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  • Test calibrator, test system and test method
  • Test calibrator, test system and test method
  • Test calibrator, test system and test method

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Embodiment Construction

[0032] The test calibrator, test system and test method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0033] Please refer to figure 1 , which is a schematic diagram of the frame structure of the testing and calibrating instrument according to the embodiment of the present invention. Such as figure 1 As shown, the test calibrator 1 includes:

[0034] The test information acquisition module 10 is used to obtain the test conditions received by the device under test and the obtained test conditions for each test item of each test machine when multiple tes...

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Abstract

The invention provides a test calibrator, a test system and a test method. The test item to be inspected and the test conditions received by the test item to be inspected are screened out from a plurality of test items by an analysis module, wherein the test item to be inspected is The inspection test item meets the following requirements: in the test of the test item to be inspected by multiple testing machines, the test result of the test item to be inspected is qualified under some testing machines; If the test result of the test item is unqualified, the test condition output by the testing machine that makes the test result of the test item to be checked unqualified can be adjusted accordingly, so as to finally determine the test result, thereby improving the reliability of the test result.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing equipment, in particular to a test calibrator, a test system and a test method. Background technique [0002] Due to the rapid introduction of increasingly complex integrated circuits, materials and processes, it is nearly impossible to meet every chip to specification in today's silicon wafer manufacturing. In order to correct problems in the production process and ensure that defective chips will not be sent to customers, chip testing (CP, Circuit Probing) is introduced in the integrated circuit manufacturing process. Chip testing is electrical parameter measurement and functional testing performed on silicon wafer-level integrated circuits in order to verify the consistency of specifications. The test can verify whether each chip has acceptable electrical performance and complete functions, and the electrical specifications used in the test process vary with the purpos...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R35/00G01R31/28
Inventor 王玉龙祁建华刘远华郝丹丹叶建明
Owner SINO IC TECH