Grating Moiré fringe wavelet subdivision method and grating displacement measuring device

A moiré fringe and grating technology, which is applied in the field of grating moiré fringe subdivision method and displacement measurement device, can solve the problems of high signal waveform quality, difficulty in error separation and correction, and large environmental impact, so as to solve the problem of randomness , strong practical value, good anti-interference effect

Inactive Publication Date: 2016-04-20
SHENYANG POLYTECHNIC UNIV
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Problems solved by technology

[0006] The invention provides a grating moiré fringe subdivision method and a grating displacement measuring device, the purpose of which is to solve the problems of high signal waveform quality, slow speed, small range, large environmental impact, and difficulty in error separation and correction in the previous methods and many other issues

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  • Grating Moiré fringe wavelet subdivision method and grating displacement measuring device
  • Grating Moiré fringe wavelet subdivision method and grating displacement measuring device
  • Grating Moiré fringe wavelet subdivision method and grating displacement measuring device

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specific Embodiment approach

[0045] Specific embodiments: the patent of the present invention will be further described below in conjunction with the accompanying drawings:

[0046] A grating moiré fringe subdivision method. The grating moiré fringe wavelet subdivision method is to modulate the phase of the wavelet base after the signal of the grating sensor is synchronously collected and corrected, and then perform wavelet transformation on the modulated signal. The maximum corresponding phase obtains the grating displacement value; the steps of the method are as follows: synchronously, high-speed, and high-precision data acquisition is performed on the four signals output by the grating sensor, and wavelet filtering and equal-amplitude amplification processing are performed on the collected signals;

[0047] ① Use four synchronous analog-to-digital converters to collect four signals output by the grating sensor:

[0048] U s ...

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Abstract

The invention provides a grating moiré fringe subdivision method and device, belonging to the field of grating displacement measurement. Grating sensors have the advantages of large measuring range, strong ability to adapt to the environment, and low cost. They are widely used in precision displacement measurement, digital display numerical control, large-stroke precision positioning, precision machining, and microelectronics industries. At present, various industries have put forward higher requirements for grating displacement measurement such as a large range of nanoscale. When the grating sensor is running, the output waveform of the grating sensor is very complicated. The grating sensor does not necessarily run at a constant speed during the measurement process, especially in the process of starting, stopping and reversing, the signal has randomness. According to the randomness of the grating signal, the wavelet subdivision method is proposed, and the high-speed and high-precision synchronous data acquisition is carried out for the four moiré fringe signals output by the grating. Phasing and extracting phase processing and finally converting to displacement.

Description

Technical field: [0001] The patent of the present invention mainly relates to a grating moiré fringe subdivision method and a displacement measuring device. Background technique: [0002] Grating sensors have the advantages of large measuring range, strong ability to adapt to the environment, and low cost. They are widely used in precision displacement measurement, digital display numerical control, large-stroke precision positioning, precision machining, and microelectronics industries. [0003] As ultra-finishing and ultra-micro-machining have entered a new era of nanotechnology, the requirements for the measurement of tiny displacements and the geometric shape of tiny objects are no longer limited to microns and sub-microns, but have reached nanometers and sub-nanometers. class. At present, various industries have put forward higher requirements for grating displacement measurement such as a large range of nanoscale. [0004] Moiré fringe subdivision is the key to impro...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 常丽
Owner SHENYANG POLYTECHNIC UNIV
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