The invention relates to a
differential capacitance displacement conversion and
subdivision method and a capacitive
linear displacement measuring
system. First, the displacement is solved with the use of a conversion reference of
differential capacitance displacement, no modulation,
demodulation,
amplifier or A / D is needed, and measurement and
subdivision are simple and accurate; second,
differential capacitance variation is converted into pulse width, a circuit needs no zeroing, no
noise, parasitic or
zero drift interference exists, and the range is not limited and is only related with the series resistance; third, the capacitive
linear displacement measuring
system is provided by the use of the method and the circuit, the
system is large in range and can be used for performing absolute position measurement, a sensor and a circuit of the system are simple, and the system is fully digital, high in precision and good in stability, can be used in harsh environments with water, oil or
dust pollution and is better than an optical
grating, a ball grid or the like; and fourth, the sensor, the circuit, a display and the like are integrated into a micro (MEMS) device, the precision is at the nanometer level, motion parameters of the MEMS such as mechanical position, displacement, velocity, amplitude and frequency can be accurately measured, and parameter transformation is remotely controlled.