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Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus

A moiré fringe and grating displacement technology, applied in measuring devices, optical devices, instruments, etc., can solve the problems of small range, large environmental impact, slow speed, etc.

Inactive Publication Date: 2014-02-26
SHENYANG POLYTECHNIC UNIV
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Problems solved by technology

[0006] The invention provides a grating moiré fringe subdivision method and a grating displacement measuring device, the purpose of which is to solve the problems of high signal waveform quality, slow speed, small range, large environmental impact, and difficulty in error separation and correction in the previous methods and many other issues

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  • Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus
  • Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus
  • Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus

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specific Embodiment approach

[0045] Specific embodiments: the patent of the present invention will be further described below in conjunction with the accompanying drawings:

[0046] A grating moiré fringe subdivision method. The grating moiré fringe wavelet subdivision method is to modulate the phase of the wavelet base after the signal of the grating sensor is synchronously collected and corrected, and then perform wavelet transformation on the modulated signal. The maximum corresponding phase obtains the grating displacement value; the steps of the method are as follows: synchronously, high-speed, and high-precision data acquisition is performed on the four signals output by the grating sensor, and wavelet filtering and equal-amplitude amplification processing are performed on the collected signals;

[0047] ① Use four synchronous analog-to-digital converters to collect four signals output by the grating sensor:

[0048] U s ...

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Abstract

The invention provides a raster Moire striped fine dividing method and apparatus, and belongs to the field of raster displacement measuring. A conventional raster sensor has the advantages of large measuring range, high environment adaptation capability, low cost and the like, and is widely applied to the industries of precision displacement measuring, digital display and numerical control, large-stroke precision positioning, precision processing, microelectronics and the like. At present, higher requirements for a wide-range nanometer level and the like of raster displacement measuring is brought forward in the various industries. When a raster sensor operates, output waveform of the raster sensor is quite complicated. The raster sensor does not necessarily move uniformly during a measuring process, and especially in a starting, stopping and inverting process, signals are random. According to the randomness of the raster signals, a wavelet fine dividing method is brought forward, high-speed high-precision synchronization data acquisition is performed on four paths of More striped signals outputted by a raster, after equal-magnitude amplification and nonopiate correction pretreatment is performed on the raster signals, wavelet phase modulation and phase extraction treatment is carried out, and finally the signals are converted to displacement.

Description

Technical field: [0001] The patent of the present invention mainly relates to a grating moiré fringe subdivision method and a displacement measuring device. Background technique: [0002] Grating sensors have the advantages of large measuring range, strong ability to adapt to the environment, and low cost. They are widely used in precision displacement measurement, digital display numerical control, large-stroke precision positioning, precision machining, and microelectronics industries. [0003] As ultra-finishing and ultra-micro-machining have entered a new era of nanotechnology, the requirements for the measurement of tiny displacements and the geometric shape of tiny objects are no longer limited to microns and sub-microns, but have reached nanometers and sub-nanometers. class. At present, various industries have put forward higher requirements for grating displacement measurement such as a large range of nanoscale. [0004] Moiré fringe subdivision is the key to impro...

Claims

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Application Information

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IPC IPC(8): G01B11/02
Inventor 常丽
Owner SHENYANG POLYTECHNIC UNIV
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