Objective table device for rapidly focusing microscope
A stage and microscope technology, applied in microscopes, optics, instruments, etc., can solve the problems of poor repeatability and difficult focusing, and achieve the effects of high precision, fast response, precise focusing and leveling
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[0014] see figure 1 and figure 2 As shown, this embodiment is composed of an upper stage 10, a base 2, a preload spring 1, a connecting bolt 3, a piezoelectric ceramic actuator 7, a steel ball 8, a slide holder 11, and a control unit 15, wherein the upper The stage 10 and the base 2 form the stand of the fast focusing device, the piezoelectric ceramic actuator 7 and the steel ball 8 realize the change of the height of the upper stage 10, and the connecting bolt 3 and the preload spring 1 form the preload unit; the upper part The stage 10 and the base 2 are supported at three points by three piezoelectric ceramic actuators 7 and three steel balls 8 . Such as figure 2 As shown, the steel ball 8 is installed in the concave ball groove of the piezoelectric ceramic actuator, and at the same time supports the upper stage 10 through point contact, and ensures the precise support force of the piezoelectric ceramic actuator 7 on the upper stage 10 through point contact. Transfer a...
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