Light irradiation device and light irradiation method

Abstract

The invention provides a light irradiation device and a light irradiation method which can maintain removal effects of organic materials the same with those of conventional light irradiation device and light irradiation method and can prevent unqualified products caused by static electricity resulted from a photoelectric effect from generating under the condition of irradiating light to a to-be-irradiated object which has metal wiring or generates the photoelectric effect. An ultraviolet irradiation device (100) irradiates ultraviolet light to the to-be-irradiated object (W) with the metal wiring (m) and is used for removing the organic materials adhered on the to-be-irradiated object (W). The ultraviolet irradiation device (100) is provided with a light source (1) irradiating the light containing the ultraviolet light under a specified wavelength and a metal reflector (3) for reflecting the light irradiated from the light source (1) to the to-be-irradiated object (W) side. An interval distance between the reflector (3) and the to-be-irradiated object is set to be shorter than a possibly existing distance of electrons flying out from a reflection surface of the reflector (3) under the effect of the ultraviolet light.

Description

technical field [0001] The present invention relates to a light irradiation device and a light irradiation method used to irradiate light to an object to be irradiated which has metal wiring or generates a photoelectric effect on at least a part thereof. Background technique [0002] In semiconductor manufacturing processes and the like, for example, organic matter adheres to the surface of the substrate due to organic gas released from resin-made components. Such organic matter on the substrate degrades the quality of the product. Therefore, the organic matter adhering to the substrate is removed by irradiating the substrate with ultraviolet light having a predetermined wavelength or less. [0003] For example, Patent Document 1 discloses that organic substances etc. on a substrate can be efficiently removed by irradiating the substrate with ultraviolet rays of 172 nm. In addition, Patent Document 1 also discloses that electric charges accumulated on a substrate are remove...

AI Technical Summary

Problems solved by technology

[0008] That is, when an object to be irradiated, such as a substrate with metal wiring, is irradiated with ultraviolet rays of a predetermined wavelength or less, product failure may occur due to static electricity caused by the photoelectric effect.

In addition, in addition to substrates with metal wiring, as long as at least a part of the object to be irradiated has a metal or semiconductor that may cause a photoelectric effect due to irradiation of ultraviolet rays, the same problem as above will occur when irradiating ultraviolet rays with a predetermined wavelength or less.

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