Evaporation equipment and its evaporation method

Abstract

The invention relates to vapor deposition equipment and a vapor deposition method of the equipment. The vapor deposition equipment comprises an evaporation source, a steam circulation mechanism and an injection mechanism which are sequentially arranged, wherein the evaporation source is used for providing organic steam; the steam circulation mechanism is used for enabling the organic steam provided by the evaporation source to circulate and flow; the injection mechanism is communicated with the steam circulation mechanism to inject the organic steam in the steam circulation mechanism to an organic coating film formed on a substrate. The steam circulation mechanism is utilized to circulate the organic steam provided by the evaporation source, so as to uniformly provide the organic steam for each position of the injection mechanism as far as possible; nozzles at each position of the injection mechanism are configured to be identical, and the undersize or oversize nozzles are not required to be arranged, so that the problem that the injection mechanism is easy to block and break down is solved from the source, and the reliability of the vapor deposition equipment is greatly promoted.

Description

technical field [0001] The invention relates to the technical field of display device preparation, in particular to an evaporation device and an evaporation method thereof. Background technique [0002] OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display device has self-illumination, no backlight module, high contrast and definition, wide viewing angle, full curing, suitable for flexible panels, good temperature characteristics, low power consumption, A series of excellent characteristics such as fast response speed and low manufacturing cost have become one of the key development directions of a new generation of flat panel display devices, and thus attract more and more attention. [0003] In the prior art, the basic structure of an OLED display device includes an anode layer, a functional film layer, and a cathode layer; the above-mentioned functional film layer includes: a hole transport layer, an organic light-emitting layer, and an electron transp...

AI Technical Summary

Problems solved by technology

However, on the one hand, this limits the maximum injection rate of the injection mechanism. On the other hand, because small nozzles are prone to clogging failures, it increases the failure rate of the injection mechanism and even the entire evaporation equipment.

Images