Heating type humidity sensor and manufacturing method thereof

A humidity sensor and heating technology, used in humidity indicators, scientific instruments, measuring devices, etc., can solve the problems of the surface being easily polluted by water, the occurrence of frosting phenomenon, the accuracy and sensitivity of humidity testing, etc., to achieve good consistency, reduce Processing difficulty, the effect of optimizing the process route

Active Publication Date: 2014-04-02
北京航天微电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a heating type humidity sensor and its manufacturing method, which can solve the problem that the current humidity sensor used for meteorologi

Method used

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  • Heating type humidity sensor and manufacturing method thereof
  • Heating type humidity sensor and manufacturing method thereof

Examples

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Embodiment 1

[0037] The substrate 1 of the heating humidity sensor is made of quartz, one side of the substrate 1 is a polished surface and the surface is insulated, and the thickness of the substrate 1 is 0.3 mm.

[0038] Both the heating resistor metal base layer 2 and the heating resistor pad metal base layer 4 are made of NiCr, and the thickness of the NiCr metal layer is 30nm.

[0039] Both the heating resistor 3 and the heating resistor pad 5 are made of Pt, the thickness of the Pt metal layer is 100nm, and the resistance value is 50Ω.

[0040] The metal base layer 6 of the capacitor lower electrode, the metal base layer 8 of the capacitor lower electrode pad and the metal base layer 9 of the capacitor upper electrode pad are all made of NiCr with a thickness of 100 nm.

[0041] The lower electrode 7 of the capacitor, the pad 10 of the lower electrode of the capacitor and the pad 11 of the upper electrode of the capacitor are all made of Au with a thickness of 200 nm.

[0042] The t...

Embodiment 2

[0056] The substrate 1 of the heating humidity sensor is made of glass, both sides of the substrate 1 are polished and the surface is insulated, and the thickness of the substrate 1 is 0.5mm.

[0057] Both the heating resistor metal base layer 2 and the heating resistor pad metal base layer 4 are made of Cr, and the thickness of the Cr metal layer is 50nm.

[0058] Both the heating resistor 3 and the heating resistor pad 5 are made of NiCr, the thickness of the NiCr metal layer is 200nm, and the resistance value is 70Ω.

[0059] The metal base layer 6 of the lower electrode of the capacitor, the metal base layer 8 of the pad of the lower electrode of the capacitor and the metal base layer 9 of the pad of the upper electrode of the capacitor are all made of NiCr with a thickness of 180 nm.

[0060] The lower electrode 7 of the capacitor, the pad 10 of the lower electrode of the capacitor and the pad 11 of the upper electrode of the capacitor are all made of Al with a thickness ...

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Abstract

The invention discloses a heating type humidity sensor, including a substrate (1), a humidity sensitive capacitance and a heating circuit. The substrate (1) is a square sheet as a supporting structure at the lowest layer. The heating circuit encircles the humidity sensitive capacitance. Two heating type humidity sensors are used at the same time; one is for heating and dehumidification cooling, and at the same time, the other one is for humidity measurement; and after one working cycle, the two sensors swap working modes. The manufacturing method of the heating type humidity sensor comprises the following steps: selecting the substrate (1); making the heating circuit; making a capacitance lower electrode (7); making a capacitance humidity sensing dielectric layer (12); and making a capacitor upper electrode (13). The heating type humidity sensor provided by the invention in the ambient temperature of 50-90 DEG C has humidity measurement range of 0%-100% RH, humidity measurement error less than +/- 3%, humidity resolution less than 0.1% and response time of less than 1s at room temperature.

Description

[0001] technical field [0002] The invention relates to a humidity sensor, in particular to a heating type humidity sensor and a manufacturing method thereof. Background technique [0003] The high-altitude meteorological environment is complex and changeable, the humidity in the air has a large spatial variability with altitude, and the temperature is in a state of continuous decline; and the humidity sensor is easily polluted when it rises through high-humidity environments such as clouds and rain, and it is also prone to contamination in low-temperature environments. Frost phenomena occur, which directly lead to serious deviations in humidity detection accuracy. [0004] The traditional capacitive humidity sensor only includes a humidity-sensitive capacitor part, which is composed of a substrate, a capacitor upper electrode, a capacitor lower electrode, an electrode pad, and a capacitor moisture-sensing medium layer. In order to realize the high-altitude low-temperature...

Claims

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Application Information

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IPC IPC(8): G01N27/22G01W1/11
Inventor 边旭明张伟彭文武黄晓杰邓娟
Owner 北京航天微电科技有限公司
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