Memory cells and methods of storing information
A memory unit and a technology for storing information, applied in read-only memory, static memory, information storage, etc., can solve problems such as memory unit failure and memory unit performance characteristics degradation
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[0010] Some embodiments include new memory cells that use indium gallium zinc oxide as the charge trapping material. Indium Gallium Zinc Oxide may be referred to as IGZO or GIZO. The order of the letters G, I, Z, and O does not imply the relative amounts of the atomic constituents represented by such letters; and thus the terms IGZO and GIZO are completely synonymous with each other.
[0011] The IGZO used in the embodiments described herein can comprise any suitable stoichiometric ratio. For example, in some embodiments IGZO may be considered to include Ga 2 o 3 : In 2 o 3 : a ratio of ZnO; and this ratio may be any suitable ratio including, for example, 1:1:1, 2:2:1, 3:2:1, 4:2:1, and the like.
[0012] figure 1 An example memory cell 10 is shown in . The memory cell includes a channel support material 12 and a stack 14 above the channel support material. Stack 14 includes dielectric material 16 , carrier trapping material 18 and conductive electrode material 20 . I...
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