MEMS resonator

A resonator, vibrating disk technology, applied in impedance networks, electrical components, etc., can solve problems such as limited thickness and radius, difficult dynamic resistance, etc.

Active Publication Date: 2014-04-09
汇隆电子(金华)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current disk resonators are all read sidewall capacitance, which is limited

Method used

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Embodiment Construction

[0039] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. Example. It can be understood that the specific embodiments described here are only used to explain the present invention, rather than limit the present invention. Based on the embodiments of the present invention, all those skilled in the art can obtain without creative work. Other embodiments all belong to the protection scope of the present invention. In addition, it should be noted that, for the convenience of description, only parts related to the present invention are shown in the drawings but not all content.

[0040] Please also see figure 1 , figure 2 and image 3 , figure 1 A side view of a MEMS r...

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Abstract

The invention provides an MEMS resonator. The MEMS resonator comprises a substrate, a vibration disc, at least one pair of input electrodes, an output electrode, an input offset voltage electrode and an anchor structure, wherein a surface area of the vibration disc is greater than a side area, the input electrodes are formed on the substrate, are at opposite sides of the vibration disc and are used for providing an alternating current signal for the vibration disc, the output electrode is arranged on the vibration disc, a capacitor medium is between the output electrode and the vibration disc, the output electrode responds to capacitance change of the capacitor medium caused by the alternating current signal to output a frequency signal, the input offset voltage electrode is arranged in parallel with a lower surface of the vibration disc and is used for providing a direct current offset voltage signal to the vibration disc, and the anchor structure is used for supporting the vibration disc onto the input offset voltage electrode and transmitting the direct current offset voltage signal to the vibration disc to realize dynamic resistance reduction of the MEMS resonator and power consumption reduction.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of oscillators, in particular to a MEMS resonator. Background technique [0002] Clocks and oscillators are central components of electronic systems such as real-time clocks, radio frequency modules in mobile phones, devices containing Bluetooth modules, USB modules, and other digital and telecommunication equipment. The timing reference in an electronic system generally uses a quartz oscillator, but the quartz oscillator is an off-chip component, which is not easy to integrate, which not only increases the integration cost, but also hinders the miniaturization of the system. Oscillators based on microelectromechanical system (Micro Electro Mechanical System, MEMS) resonators are a kind of oscillators that have developed rapidly in recent years. Among them, MEMS resonators are small in size, high in Q (quality factor) value, and low in power consumption. The process is compatible with ...

Claims

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Application Information

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IPC IPC(8): H03H9/24H03H9/02
Inventor 张乐欧文明安杰张文博张宇任耀辉
Owner 汇隆电子(金华)有限公司
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