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mems resonator

A technology of resonators and vibrating disks, applied in the direction of electrical components, impedance networks, etc., can solve the problems of difficult dynamic resistance, limited thickness and radius, etc.

Active Publication Date: 2017-06-23
汇隆电子(金华)有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, the current disk resonators are all read sidewall capacitance, which is limited by thickness and radius, making it difficult to effectively reduce the dynamic resistance

Method used

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Embodiment Construction

[0039] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. Example. It can be understood that the specific embodiments described here are only used to explain the present invention, rather than limit the present invention. Based on the embodiments of the present invention, all those skilled in the art can obtain without creative work. Other embodiments all belong to the protection scope of the present invention. In addition, it should be noted that, for the convenience of description, only parts related to the present invention are shown in the drawings but not all content.

[0040] Please also see figure 1 , figure 2 and image 3 , figure 1 A side view of a MEMS r...

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Abstract

The present invention provides a MEMS resonator, comprising: a substrate; a vibration plate, the surface area of ​​the vibration plate is larger than the side area; at least one pair of input electrodes formed on the substrate and located on opposite sides of the vibration plate, Used to provide an AC signal for the vibrating plate; the output electrode is arranged on the vibrating plate, and there is a capacitive medium between the output electrode and the vibrating plate, wherein the output electrode responds to the AC signal caused by The capacitance of the capacitive medium changes to output a frequency signal; the input bias voltage electrode is arranged in parallel with the lower surface of the vibrating plate, and is used to provide a DC bias voltage signal for the vibrating plate; the anchor structure is used to The vibrating plate is supported on the input bias voltage electrode and transmits the DC bias voltage signal to the vibrating plate, so as to reduce the dynamic resistance of the MEMS resonator and reduce power consumption.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of oscillators, in particular to a MEMS resonator. Background technique [0002] Clocks and oscillators are central components of electronic systems such as real-time clocks, radio frequency modules in mobile phones, devices containing Bluetooth modules, USB modules, and other digital and telecommunication equipment. The timing reference in an electronic system generally uses a quartz oscillator, but the quartz oscillator is an off-chip component, which is not easy to integrate, which not only increases the integration cost, but also hinders the miniaturization of the system. Oscillators based on microelectromechanical system (Micro Electro Mechanical System, MEMS) resonators are a kind of oscillators that have developed rapidly in recent years. Among them, MEMS resonators are small in size, high in Q (quality factor) value, and low in power consumption. The process is compatible with ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/24H03H9/02
Inventor 叶国萍王俭锋
Owner 汇隆电子(金华)有限公司
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