Vacuum evaporation equipment for organic material

An organic material and evaporation technology, which is applied in the field of organic material vacuum evaporation equipment, can solve the problems of automatic control, low precision, slow organic material vacuum evaporation process, etc.

Inactive Publication Date: 2014-04-16
CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, domestic vacuum evaporation equipment for organic materials lacks effective monitoring and automatic control of the vacuum evaporation process of organic materials. Low, serious loss; at the same time, due to the inability to automatically control the vacuum evaporation process of organic materials

Method used

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  • Vacuum evaporation equipment for organic material
  • Vacuum evaporation equipment for organic material

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Embodiment Construction

[0039] The invention provides a vacuum evaporation equipment for organic materials, including a vacuum evaporation chamber and an automatic control system;

[0040] Wherein, the vacuum evaporation chamber includes:

[0041] cavity;

[0042] Vacuuming equipment communicated with the cavity;

[0043] A resistance heating beam source furnace arranged in the cavity for heating the evaporation source, a first baffle is arranged above the resistance heating beam source furnace;

[0044] a substrate platform corresponding to the resistance heating beam source furnace, and a second baffle is arranged on the substrate platform;

[0045] a mask storage bin arranged in the cavity;

[0046] A reticle docking system connected to the reticle storage bin for transporting the reticle and docking or separating the reticle from the substrate;

[0047] a mechanical transfer system communicating with the chamber for transferring substrates and connecting or separating the substrates from the ...

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Abstract

The invention provides vacuum evaporation equipment for an organic material. The vacuum evaporation equipment comprises a vacuum evaporation chamber and an automatic control system. In the vacuum evaporation equipment, all modules collect all parameter signals in the vacuum evaporation chamber and transmit the parameter signals to a chief controller, according to the preset parameters, the chief controller processes the received parameter signals so as to obtain feedback signals, the feedback signals are fed back to corresponding control modules, and the corresponding control modules automatically regulate and control corresponding parts according to corresponding feedback signals, so that organic material vacuum coating is automatically controlled, a large amount of manpower is saved, the vacuum evaporation process for the organic material can be monitored effectively, and the accuracy, quality and speed of vacuum evaporation for the organic material are improved.

Description

technical field [0001] The invention belongs to the technical field of vacuum evaporation, in particular to a vacuum evaporation equipment for organic materials. Background technique [0002] In the past decade, organic optoelectronic devices such as organic light-emitting diodes, organic solar cells, and organic thin-film transistors have received extensive attention from academia and industry. Through the continuous efforts of scientific researchers, the related technologies of organic optoelectronic devices have been greatly developed, and the organic optoelectronic device industry is rapidly forming and constantly maturing and growing. At the same time, the demand for high-performance and high-quality organic optoelectronic devices in the international and domestic markets is increasing day by day. The good news is that my country's basic research in the field of organic optoelectronic devices is very solid, and the concept of material synthesis and device design is bas...

Claims

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Application Information

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IPC IPC(8): C23C14/26
Inventor 张洪杰周亮李成宇邓瑞平
Owner CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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