Three-freedom-degree precision locating platform
A technology of precise positioning and degrees of freedom, applied in the micro-nano field, can solve the problems of low axial bearing capacity, complex structure, small stroke, etc., and achieve the effect of high axial rigidity and simple and compact structure
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[0013] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:
[0014] see figure 1 and figure 2 , a three-degree-of-freedom precision positioning platform, including a base 9 and a moving platform 7 arranged inside it, and the base and the moving platform 7 pass through three hinge amplifying mechanisms 5 uniformly distributed along the circumference of the moving platform It is connected with three plate-shaped flexible hinge mechanisms 6; one end of each hinge amplifying mechanism 5 is flexibly connected with the base 9, and the other end is flexibly connected with the moving platform 7, and an input end is provided in the middle, and the hinge amplifying mechanism The input end of the piezoelectric ceramic driver 1 is connected with the piezoelectric ceramic driver 1 through the flexible hinge 4 and...
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