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Three-freedom-degree precision locating platform

A technology of precise positioning and degrees of freedom, applied in the micro-nano field, can solve the problems of low axial bearing capacity, complex structure, small stroke, etc., and achieve the effect of high axial rigidity and simple and compact structure

Inactive Publication Date: 2014-04-16
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, at present, the micro-nano-scale precision positioning platform mainly uses two-degree-of-freedom translation. Even the designed three-degree-of-freedom precision positioning platform has defects such as complex structure, small stroke, and low axial bearing capacity, which is difficult to meet the requirements of practical applications. need

Method used

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  • Three-freedom-degree precision locating platform
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Examples

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Embodiment Construction

[0013] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0014] see figure 1 and figure 2 , a three-degree-of-freedom precision positioning platform, including a base 9 and a moving platform 7 arranged inside it, and the base and the moving platform 7 pass through three hinge amplifying mechanisms 5 uniformly distributed along the circumference of the moving platform It is connected with three plate-shaped flexible hinge mechanisms 6; one end of each hinge amplifying mechanism 5 is flexibly connected with the base 9, and the other end is flexibly connected with the moving platform 7, and an input end is provided in the middle, and the hinge amplifying mechanism The input end of the piezoelectric ceramic driver 1 is connected with the piezoelectric ceramic driver 1 through the flexible hinge 4 and...

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Abstract

The invention discloses a three-freedom-degree precision locating platform which comprises a base and a moving platform arranged in the base. The base and the moving platform are connected through three hinge expansion mechanisms evenly distributed in the peripheral direction of the platform and three plate-shaped flexible hinge mechanisms. One end of each hinge expansion mechanism is in flexible connection with the base, the other end of the hinge expansion mechanism is in flexible connection with the moving platform, the middle of the hinge expansion mechanism is provided with the input end, and the input end is connected with a piezoelectric ceramic driver. Each plate-shaped flexible hinge mechanism comprises an arc flexible plate and one to five radial flexible plates perpendicularly fixed to the arc flexible plate. The three-freedom-degree precision locating platform can achieve two horizontal movements and one rotation and is simple and compact in structure. Displacement expansion and force transmission are conducted by utilizing the hinge expansion mechanisms, so that the plate-shaped flexible hinge mechanisms have elastic deformation to drive the moving platform to move and achieve output of micro-nano displacement, the output displacement is large, and axial rigidity is high. The three-freedom-degree precision locating platform can serve as an auxiliary locating platform of a nano-micro operating system to achieve micro-feeding and precise locating.

Description

technical field [0001] The invention belongs to the field of micro-nano technology, and specifically relates to a two-translation-rotation three-degree-of-freedom flexible precision positioning work platform that can be applied to a micro-operating system. Background technique [0002] With the development of science and technology, there is an urgent need for submicron or even nanometer precision positioning technology in the fields of ultra-precision machining, microelectronics engineering, bioengineering, and nanotechnology. The most typical application lies in the manufacture and production of nanometer devices. Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16M11/08F16M11/18G12B5/00
Inventor 蔡坤海田延岭张大卫
Owner TIANJIN UNIV
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