mems sensor

A sensor and substrate technology, applied in scientific instruments, measuring devices, meteorology, etc., can solve the problems of incompatibility of microelectronic processes in production processes, difficulty in large-scale use, measurement influence, etc., and achieve easy control of process quality, shortened distance, The effect of reducing the volume

Inactive Publication Date: 2016-03-23
NANJING UNIV OF INFORMATION SCI & TECH
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  • Description
  • Claims
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Problems solved by technology

However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatible with microelectronics processes
Instruments based on optical principles are also easily affected by the surrounding environment, such as dust blocking the lens, which will affect the measurement

Method used

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  • mems sensor

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing, the technical scheme of invention is described in detail:

[0022] Such as figure 1 The shown MEMS sensor includes: a first substrate 101, a second substrate 201, and a third substrate 301 made of a single crystal silicon wafer. The third substrate 301 is the base of the MEMS micromechanical sensor, and the second substrate 201 is placed on the third substrate. The substrate 301 is above and connected to the third substrate 301 , the first substrate 101 is placed above the second substrate 201 and connected to the second substrate 201 .

[0023] The first substrate 101 is processed by the MEMS process to obtain a first cavity 103 with an upward opening and a second cavity 104 with a downward opening. The part of the first substrate between the first cavity 103 and the second cavity 104 constitutes the first film. sheet 102,

[0024] The second substrate 201 is provided with a first through hole 202 , and the first throug...

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Abstract

The invention discloses an MEMS (Micro-Electromechanical System) sensor, belonging to the technical field of micro-mechanical sensors. The sensor comprises three layers of substrates made from monocrystalline silicon wafers, a unique path for gas circulation is formed by a second cavity, a first through hole, a third cavity and a second through hole, and measuring resistors and a heating resistor are arranged at the narrowest part of the path for gas circulation, so that the sensitivity of the micro-mechanical sensors is improved. Precipitation particles can be measured by using the micro-mechanical sensors.

Description

technical field [0001] The invention discloses a MEMS sensor and belongs to the technical field of micromechanical sensors. Background technique [0002] Measuring precipitation is an important part of meteorological measurements. Traditional methods of measuring precipitation mainly use tipping bucket or cylinder rain gauges. However, there is a wetting error in the traditional rain gauge. When there are only a few precipitation particles, the wetting error may make the instrument unable to detect the precipitation particles. At the same time, traditional rain gauges cannot measure the mass of raindrops, nor can they distinguish raindrops from hail. [0003] The current raindrop spectrometer based on the principle of optical scattering can measure the quality of raindrops and avoid infiltration errors. However, this raindrop spectrometer is expensive, difficult to use on a large scale, and its production process is not compatible with microelectronics processes. Instrum...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/04G01N27/14G01W1/14
Inventor 刘清惓李海涛韩晓丹曹鸿霞
Owner NANJING UNIV OF INFORMATION SCI & TECH
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