Flexible hinge and floating frame matched clamping and positioning device for optical component

Abstract

The invention discloses a flexible hinge and floating frame matched clamping and positioning device for an optical component. A flexible hinge and a floating frame are matched to be used for clamping and positioning the optical component, so that a large-caliber optical component is provided with the low-stress-strain reliable clamping capacity in the horizontal plane, moreover, the floating frame and two-dimensional large stroke are in flexible connection, so that the parallelism between the optical element surface and the work table plane is guaranteed. The flexible hinge is fixedly connected with a crystal frame, connection lugs are fixed on the crystal frame, positioning blocks are fixed in the crystal frame, and the optical component is disposed in the crystal frame integrally and positioned through the positioning blocks. Locking blocks are fixed in the crystal frame, first positioning screws are screwed in the locking blocks, and the optical component is pre-clamped and fixed between the first positioning screws and the positioning blocks. Compression blocks are fixedly connected with the crystal frame, and the optical component is compressed and fixed vertically through the compression blocks. Spherical hinge studs are fixedly connected with connection lugs and are in contact with air floating pads. The device is used for clamping and positioning of optical elements during micro-defect rapid searching and repairing.

Description

technical field [0001] The invention relates to a flexible hinge matched with an air floating frame for clamping and positioning of optical components. Background technique [0002] In the process of ultra-precision machining and strong laser targeting, the surface of the optical element is prone to produce micro-cracks or ablation pits and other forms of micro-defects on the surface of the optical element due to the fly-cutting process or the impact of the strong laser. The micro-defects on the surface of the component need to be removed as soon as possible in the early stage of forming, otherwise they will grow rapidly during the strong laser targeting process, resulting in damage to the optical component and making it unusable. Since the cost of the optical component is extremely expensive, it will cause great waste. At present, the use of micro-repair methods is proposed to delay the performance and service life of optical components, and a large number of feasibility ex...

AI Technical Summary

Problems solved by technology

When the air-floating frame is driven by the two-dimensional large-stroke linkage device to realize a large-scale full-stroke movement, it is necessary to ensure that the surface of the optical element and the surface of the working platform have a high degree of parallelism and the distance between the two planes is basically constant during the full-stroke movement. Therefore, the air-floating frame cannot be rigidly connected directly with the two-dimensional large-stroke linkage device. Otherwise, due to the manufacturing error, assembly error and their comprehensive superposition of the two-dimensional large-stroke two moving axes themselves, the error will accumulate on the air floating frame. As a result, the position and posture of the optical components cannot meet the requirements of repair processing

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