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Optical Rotation Device and Interferometric Phase Contrast Microscope

A rotating device and interferometric phase technology, applied in the direction of using optical devices, optics, measuring devices, etc., can solve the problems of increased production, difficulty, and slow extraction speed, and achieve simplified and precise control, increased operating speed, and reduced detection time. Effect

Active Publication Date: 2017-07-28
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, to accurately stop the polarizer at a specific rotation angle requires complex control, which increases the difficulty of production
In addition, since the intermittent rotation of the stepping motor needs to be controlled, the rotation speed of the stepping motor cannot be further increased, making the image acquisition speed of the object slower and increasing the detection time of the overall interference phase contrast microscope

Method used

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  • Optical Rotation Device and Interferometric Phase Contrast Microscope
  • Optical Rotation Device and Interferometric Phase Contrast Microscope
  • Optical Rotation Device and Interferometric Phase Contrast Microscope

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Embodiment Construction

[0071] figure 1 It is a schematic diagram of the interference phase contrast microscope 1 according to the first embodiment of the present invention. In this embodiment, the interference phase contrast microscope 1 is a reflective microscope, and the interference phase contrast microscope 1 includes a light source 10, a projecting mirror group 20, an image taking mirror group 30, an object 40, an image sensor 50, An optical rotating device 60 and a data processing module 70 .

[0072] The light source 10 can be a light emitting diode, a laser diode, or a light bulb, and is used to generate a light beam. The center wavelength of the light beam can be 55 nm, and the bandwidth is 20 nm. The aforementioned light beam travels along a line of travel. The projection lens group 20 , the image pickup lens group 30 , the object 40 , and the image sensor 50 are all arranged on the traveling route of the light beam.

[0073] The projecting lens group 20 includes a filter 21 (flter), a ...

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Abstract

The invention discloses an optical rotating device and an interference phase contrast microscope. The optical rotating device includes a rotating assembly and a driving mechanism. The rotating assembly has a plurality of drive grooves, which are arranged in a ring at equal intervals on the side wall of the rotating assembly. The drive mechanism includes a drive lug that continuously rotates around the axis of rotation. The optical assembly is arranged on the rotating assembly, and when the driving projection is located in the driving groove, the driving projection pushes the rotating assembly to rotate, thereby causing the optical assembly to rotate intermittently.

Description

technical field [0001] The present invention mainly relates to a rotating device, especially to an optical rotating device and an interference phase contrast microscope. Background technique [0002] At present, an interference phase contrast microscope can be used to obtain a three-dimensional image of the surface of an object to provide measurement and analysis for defects on semiconductors. Generally known interference phase contrast microscopes use polarizers to rotate, and after the polarizers are stationary at predetermined rotation angles, images of an object at different biases are captured through an image sensor. Afterwards, through a suitable image processing method and integral calculation, the aforesaid multiple images are formed into a stereoscopic image of the aforesaid object surface. [0003] The rotation of the aforementioned polarizer is controlled by a stepping motor in the known technology. The polarizing plate is rotated by intermittently driving the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/06G01N21/88G01B9/02
Inventor 刘定坤余昇刚
Owner IND TECH RES INST