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Resonator element and resonator
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A vibrating piece and vibrator technology, applied in power oscillators, piezoelectric devices/electrostrictive devices, material selection for piezoelectric devices or electrostrictive devices, etc., can solve problems such as Q value degradation
Inactive Publication Date: 2014-05-21
SEIKO EPSON CORP
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[0006] However, when the tapered portion is actually provided, the Q value may deteriorate depending on the shape of the tapered portion
Method used
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Embodiment approach 1
[0044] figure 1 It is a plan view showing the schematic structure of the vibrating piece of Embodiment 1, figure 2 (a) is shown figure 1 A cross-sectional view of the A-A section, figure 2 (b) is shown enlarged figure 1 A partial floor plan of Part B. First, refer to figure 1 A schematic structure of the vibrating element will be described. The vibrating piece 10 is developed on a plane composed of an X axis and a Y axis perpendicular to the X axis, and the Z axis represents the thickness.
[0045]The material of the vibrating piece 10 of this embodiment is not particularly limited, and may be quartz, a piezoelectric material other than quartz, or other materials. In the case of quartz, the X axis is the electrical axis and the Y axis is the mechanical axis. The vibrator is cut out from a single crystal of quartz so that the optical axis and the Z axis are the optical axes.
[0046] In addition, although the vibrating piece 10 of this embodiment exemplifies a resonant...
no. 1 Embodiment ）
[0058] First, refer to Figure 4 pairs such that Q / Q 0 The description will be made for the range of 1.1 or more.
[0059] Figure 4 is shown such that Q / Q 0 It is a graph showing the relationship between the tapered length occupancy η (horizontal axis) and the tapered width occupancy ξ (vertical axis) of 1.1 or more. Here, for the taper length occupancy η and taper width occupancy ξ used, from the above image 3 is extracted such that Q / Q 0 It is in the range of 1.1 or more.
[0060] exist Figure 4 , the upper curve represents such that Q / Q 0 The upper limit range of the taper width occupancy ξ relative to the taper length occupancy η is 1.1 or more, the lower curve indicates the lower limit range, and the middle curve indicates only the maximum value (ξmax) is drawn. It should be noted that the maximum value ξmax is such that Q / Q 0 The value of the maximum value of ξ. Also, for the upper curve, ξ is expressed as ξ=-4.723×10 in the range where the tapered length oc...
no. 2 Embodiment ）
[0068] Next, refer to Figure 5 pairs such that Q / Q 0 The description will be made for the range of 1.2 or more.
[0069] Figure 5 is shown such that Q / Q 0 It is a graph showing the relationship between the tapered length occupancy η (horizontal axis) and the tapered width occupancy ξ (vertical axis) of 1.2 or more. Here, for the taper length occupancy η and taper width occupancy ξ used, from the above image 3 is extracted such that Q / Q 0 It is in the range of 1.2 or more.
[0070] exist Figure 5 , the upper curve represents such that Q / Q 0 The upper limit range of the taper width occupancy ξ relative to the taper length occupancy η is 1.2 or more, the lower curve indicates the lower limit range, and the middle curve indicates a graph in which only the maximum value (ξmax) is drawn. It should be noted that the maximum value ξmax is such that Q / Q 0 The value of the maximum value of ξ. Also, for the upper curve, ξ is expressed as ξ=-5.255×10 in the range where the t...
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Abstract
The invention provides a resonator element and a resonator. The resonator element comprises a base and a vibrating arm. The vibrating arm comprises a width enlarging part extended from the base, an arm part extended from the width enlarging part, and a combination part arranged towards the width enlarging part and the base along the width enlarging part and the arm part. The width enlarging part is gradually widened along the direction intersected with the elongation direction thereof. The length of the vibrating arm along the extension direction is L, and the width of the arm part along the intersection direction is W. The length of the width enlarging part along the elongation direction is Lt. The outer edge of the width enlarging part engaged with the outer edge of the arm part is provided with a first combination part. The outer edge of the width enlarging part engaged with the base is provided with a second combination part. Between the first and second combination parts, the width of a taper part is Wt. The length occupancy of the length Lt of the width enlarging part to the length L of the vibrating arm satisfies eta=Lt / L. The width occupancy of the width Wt of the taper part to the width W of the arm part satisfies xi=2Wt / W. When the above condition is met, 0.0168 <= eta <= 0.1680. Meanwhile, 2.409 [eta]2 + 4.728 * 10 -2[eta]+2.959 * 10-2 <[xi]<= -4.723*101[eta]2+1.434 * 101[eta]+1.711*10-2.
Description
[0001] This application is a divisional application of an invention patent application with an application date of April 7, 2011, an application number of 201110086238.7, and an invention title of "vibrating plate and vibrator". technical field [0002] The present invention relates to a vibrating piece and a vibrator with the vibrating piece. Background technique [0003] Conventionally, there is known a vibrating piece that has a vibrating arm and a base to which the vibrating arm is coupled, and a tapered portion that is symmetrical with respect to the vibration center of the vibrating arm is provided at the joint between the vibrating arm and the base (for example, refer to Patent Document 1). . [0004] [Patent Document 1] Japanese Unexamined Patent Publication No. 2005-5896 [0005] In such Patent Document 1, by providing a tapered portion at the joint between the vibrating arm and the base, the leakage of the fundamental vibration is suppressed, thereby increasing th...
Claims
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