Analyzing and compensating system for optical mirror face few-axle grinding inclining cambered face grinding wheel errors

Abstract

The invention discloses an analyzing and compensating system for optical mirror face few-axle grinding inclining cambered face grinding wheel errors. The analyzing and compensating system comprises a few-axle grinding inclining cambered face grinding wheel error source determining module, a few-axle grinding machine tool structure and grinding mode selecting module, a grinding wheel ideal movement envelope surface constructing module, a grinding wheel coordinate system, diameter and cutting radius determining module, a tool setting operation horizontal movement amount determining module, an inclining cambered face grinding wheel composition error model constructing module, a mirror face error detecting and processing module, a cambered face grinding wheel error component separating module, an inclining cambered face grinding wheel error compensating module and the like. Compare with the prior art, the error analyzing and compensating system can predict, separate and compensate face errors caused by the large complex optical mirror face few-axle grinding inclining cambered face grinding wheel errors under the combination of various machine tool structures and grinding modes, and is systemic, integral and visual. The analyzing and compensating system can be used for compensating the errors caused in the machining process of any curved face and any caliber mirror face after one-time detection, and has the advantages of being simple and efficient.

Description

technical field [0001] The invention relates to a grinding wheel error analysis and compensation system, in particular to an analysis and compensation system for the error analysis and compensation of a large complex optical mirror with few axes grinding inclined arc surface grinding wheel. Background technique [0002] In recent years, with the increasing demand for large-scale telescopes for ground and space observations, it has become an urgent requirement to manufacture optical mirrors with large size, high surface accuracy, and low subsurface damage. Off-axis aspheric surface is the main form of current optical mirror. For ultra-precision large-scale optical mirror grinding, the diameter of the general optical mirror surface should be more than 1m, and the surface shape accuracy of the processed optical mirror surface should be better than 10 microns. [0003] At present, different from the traditional five-axis fixed contact point grinding, the few-axis grinding with ...

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Problems solved by technology

Although this method can compensate the error of the grinding wheel, the calculation is complicated

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