Planar motor magnetic array tooling device and installation method thereof

Abstract

The invention provides a magnet array tool device of a planar motor and an installation method of the magnet array tool device of the planar motor. The magnet array tool device of the planar motor is used for installation of magnets needed by the planar motor. The magnet array tool device of the planar motor comprises an installation substrate, a grate, a transverse datum strip and a longitudinal datum strip. According to the magnet array tool device of the planar motor, the grate is fixed to the installation substrate, the limiting function and the function for fixing first permanent magnets are achieved at the same time, and therefore the first permanent magnets are convenient to install; the grinding process is replaced by the transverse datum strip and the longitudinal datum strip, the first permanent magnets are flatter, and the assembly flatness of the upper surface of a magnetic pole body is improved; through clamping of the transverse datum strip and the longitudinal datum strip, the extra installation limiting function can be achieved on the first permanent magnets at the intersecting position of the transverse datum strip and the longitudinal datum strip, and therefore the installation precision of the first permanent magnets is improved.

Description

technical field [0001] The invention relates to the field of manufacturing magnetic levitation planar motors, in particular to a magnetic array tooling device for a planar motor and an installation method thereof. Background technique [0002] In recent years, planar motors have become a research hotspot in the field of semiconductor industry, which is committed to researching smaller devices with more functions and lower prices. With the advancement of science and technology, the lithography machine is required to run fast and stably. It is necessary to require the workpiece table to be small in mass, high in rigidity, and low in interference, and to be able to accurately position silicon wafers in a vacuum. Moving magnets have these advantages. The first maglev table appeared in 1997, using a moving magnet. However, due to structural control and other factors, the travel of the maglev table was limited. However, after changing to a moving coil structure, the influence of t...

AI Technical Summary

Problems solved by technology

[0004] In the magnetic array module of the magnetic levitation planar motor, the magnet is currently mainly fixed by mechanical tightening, which has low fixing accuracy. These methods have many problems: there are uneven gaps between the magnetic poles, and the straightness cannot be guaranteed, resulting in a certain The unevenness of the periodic magnetic field in one direction produces high-order harmonics; the assembly orthogonality error in the two directions perpendicular to each other on the plane is large, resulting in inter-axis coupling problems; the height of the magnetic poles on the working surface of the magnetic steel array is different, and the flatness Therefore, it is very necessary to find a reasonable and effective tooling structure of the magnetic levitation table, which can effectively improve the assembly and positioning accuracy of the magnetic levitation table, thereby improving the driving accuracy of the motor

There are several problems in this method: (1) the tolerance between the multiple assembly holes on the mounting base and the copper pillars is difficult to match uniformly, and the assembly position cannot be accurately guaranteed when the aluminum base is assembled with the magnetic pole; (2) the assembly fixture The assembly efficiency is low; (3) The grinding process can only ensure the mechanical flatness of the surface of the tooling device, but cannot guarantee the assembly flatness of the upper surface of the pole body

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