Thrust distribution method for magnetic levitation planar motor

Abstract

The invention relates to a thrust distribution method for a magnetic levitation planar motor. A vertical drive unit of the magnetic levitation planar motor comprises four voice coil motors. The combined action of the four voice coil motors completes rotation around the X-axis, rotation around the Y-axis and Z-directional translation so that vertical three-degree-of-freedom motion can be achieved. According to the thrust distribution strategy for the four vertical voice coil motors of the magnetic levitation planar motor, the differences, between an actual model and a theoretical model, caused by assembly and other links are avoided, and regular feature vectors are solved through the identification solving method. On the basis of vertical stress equations of the magnetic levitation planar motor, the condition that the sum of modal force equals zero serves as a constraint, an obtained thrust distribution particular solution set is utilized, so that modal contributions of all the vertical voice coil motors counteract one another, and the problem of flexible vibration is solved in physical natural level. The thrust distribution method for the magnetic levitation planar motor is accurate and convenient to implement, and meanwhile necessary conditions are provided for accurate control over the magnetic levitation planar motor.

Description

technical field [0001] The invention relates to a thrust distribution method of a magnetic levitation plane motor, in particular to a thrust distribution method for suppressing vibration of a magnetic levitation plane motor based on modal force. Background technique [0002] The magnetic levitation planar motor driven by multiple voice coil motors with a single component has the advantages of simple structure, no mechanical contact, and fast response speed. It has become a loading platform for precise positioning and fast movement, and is widely used in photolithography in IC manufacturing equipment In high-end manufacturing equipment such as machine silicon wafer table, PCB board making, biological detection, semiconductor detection, etc. In 2009, Philips Applied Technologies, ASML and other IC manufacturing equipment manufacturers have clearly taken the magnetic levitation planar motor motion system as the main research direction. Research institutions such as the Massach...

AI Technical Summary

Problems solved by technology

While the loading area of ​​the planar motor is increasing, it is also necessary to meet the requirements of lightweight structure, so the vertical thickness of the planar motor will become thinner, and the contradiction between structural quality and flexibility will become prominent, so that the thrust of the vertical motor will excite the low-order modes of the structure , causing flexible vibration behavior, which in turn affects the positioning and motion accuracy and the stability of the control system

On the other hand, flexible vibration will affect the dynamic quality of the motion table, and the controller design method based on rigid body assumptions can no longer meet the requirements of nanometer and subnanometer precision.

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