Cross-scale high-precision sampling mechanism of atomic force microscope

Abstract

The invention provides a cross-scale high-precision sample feeding mechanism of an atomic force microscope. The problems that in the using process of a traditional atomic force microscope, the positions of samples are fixed, the scanning imaging range of a microscope probe is limited at a micron level are solved. According to the sample feeding mechanism, the samples can move at a large range from the micron level to a millimeter level and move in a high-precision mode, so that the scanning imaging range of the atomic force microscope is expanded to the millimeter level from the micron level. The cross-scale high-precision sample feeding mechanism comprises a rough level moving mechanism, a fine level moving mechanism and an atomic force microscope levelling mechanism. The rough level moving mechanism is composed of a lead screw nut mechanism in the X direction and a lead screw nut mechanism in the Y direction, the moving range of the rough level moving mechanism is at the millimeter level, and the positioning precision reaches a micron level. The fine level moving mechanism is composed of piezoelectric ceramics in the X direction and piezoelectric ceramics in the Y direction, and the moving range of the fine level moving mechanism is at the micron level, and the positioning precision reaches a submicron level. The atomic force microscope levelling mechanism is used for adjusting the distance and the level degree between the atomic force microscope and the samples. The cross-scale high-precision sample feeding mechanism of the atomic force microscope is high in practicability, the traditional atomic force microscope is arranged on the sample feeding mechanism, and the purpose of cross-scale large-range scanning imaging from the micron level to the millimeter level can be achieved.

Description

technical field [0001] The invention relates to a sample feeding mechanism matched with an atomic force microscope. It is mainly used for the feeding of the sample to be tested, so that the scanned sample can move from micrometer to millimeter with high precision, thus expanding the scanning imaging range of atomic force microscope from micrometer to millimeter. Background technique [0002] AFM uses a force-sensitive cantilever with a needle tip to detect structural information on the surface of a sample. One end of the micro-cantilever is a tiny tip. When the tip approaches the sample surface, the van der Waals force between the atoms at the tip of the tip and the atoms on the sample surface will cause the micro-cantilever to deform. The deformation can be amplified and detected by the laser beam, and the obtained The geometry of the sample surface. The other end of the cantilever beam is fixed on the feeding mechanism, such as piezoelectric ceramics, to realize the scan...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the existing atomic force microscope feeding mechanism has a small range of motion and cannot meet the problem of cross-scale and high-precision sample feeding in large scanning ranges such as biological applications, and provides a cross-scale high-precision sample feeding mechanism for atomic force microscopes

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