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Holographic grating three-dimensional active stability control recording method

A technology of active stabilization and controlled recording, applied in diffraction gratings, instruments, etc., can solve the problems of prolonged holographic exposure time, affecting the morphology of holographic grating masks, etc., to achieve the effect of improving stability

Active Publication Date: 2014-07-30
SUZHOU UNIV
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Problems solved by technology

With the increase of the grating aperture, the interference optical path becomes huge, and the holographic exposure time will be greatly extended. When the interference fringe density of holographic recording is relatively high, such as the grating period is on the sub-micron scale, and the grating aperture is in the meter-scale range, the holographic recording The cumulative effect of tens of nanometers of movement changes in the interference light field will seriously affect the morphology of the holographic grating mask

Method used

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  • Holographic grating three-dimensional active stability control recording method
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  • Holographic grating three-dimensional active stability control recording method

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Embodiment 1

[0029] Embodiment one: attached figure 1 is a schematic diagram of moiré fringes, see appendix figure 2 To attach Figure 8 As shown, a holographic grating three-dimensional active stable control recording method, the aperture of the main grating to be recorded is 400mm×1000mm, and the grating space frequency is 1740Line / mm. The grating recording process includes the following steps:

[0030] (1) As attached figure 2 As shown, it is a schematic diagram of the principle of interference light field control in this embodiment. In the holographic interference recording light field, two reference grating dry plates are set on the side of the main grating dry plate 1 to be placed, and then the two reference grating dry plates are simultaneously controlled. For exposure, the incident angle of the first recording light beam 7 and the second recording light beam 8 relative to the holographic grating dry plate is 21.06 degrees, and the wavelength of the recording light is 0.4131um. ...

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Abstract

The invention discloses a holographic grating three-dimensional active stability control recording method. The method specifically comprises the steps that first, two reference gratings are manufactured; second, moire fringes of the two reference gratings are acquired; third, a main grating dry plate is placed in a holographic recording light path, interference recording light is started, a moire fringe image formed by a recording light field and two reference gratings is recorded, and a reference image is acquired; fourth, the moire fringe image formed by the recording light field and the two reference gratings is recorded in real time; fifth, the moire fringe image is compared with the reference image, mobile information of the moire fringe image is acquired, a compensation device is adjusted and controlled in real time, and the real-time moire fringe image and the reference image are consistent; sixth, set exposure time is up, and a main grating is acquired through development. Through the three-dimensional active stability control interference light field, when the recording light field changes relative to a grating substrate, real-time dynamic compensation can be achieved in a long-time exposure process, and stability of large-caliber grating holographic records is improved.

Description

technical field [0001] The invention relates to a three-dimensional active stable control recording method of a holographic grating, which is used to realize long-time holographic exposure recording of a large-diameter grating. Background technique [0002] Large-aperture pulse compression grating is the key component to realize ultrafast and ultraintense pulse laser. In ultra-high-power petawatt-level laser devices, the requirements for the aperture of the grating have reached the meter level. With the increase of the grating aperture, the interference optical path becomes huge, and the holographic exposure time will be greatly extended. When the interference fringe density of holographic recording is relatively high, such as the grating period is on the sub-micron scale, and the grating aperture is in the meter-scale range, the holographic recording The cumulative effect of tens of nanometer motion changes of the interference light field will seriously affect the morpholo...

Claims

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Application Information

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IPC IPC(8): G03H1/12G02B5/18
Inventor 李朝明吴建宏陈新荣
Owner SUZHOU UNIV
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