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focus shift sensor

A technology of displacement sensor and focus offset, which is applied in the field of sensors, can solve unsolvable problems, achieve high applicability, high practical value, and reduce measurement errors

Active Publication Date: 2016-08-17
海宁科海光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is to say, it cannot solve the problem of displacement measurement error caused by the inclination of the measured surface when the sensor measures a small displacement

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 2

[0065] The structure and principle of this embodiment are basically the same as those of Embodiment 1, except that the positioning mechanism includes a strip-shaped positioning bar 18 fixed on the inside of the housing 1 and a positioning hole 14a at the bottom of the connecting block 14 .

[0066] The positioning bar 18 is arranged parallel to the guide rail one 13 and the positioning bar 18 is located at the bottom of the connecting block 14. There are positioning springs 19 and balls 20 in the positioning hole 14a. The positioning bar 18 has several concave positioning notches 18a along its axial direction. , the ball 20 partially protrudes from the positioning hole 14a under the elastic force of the positioning spring 19 and can be embedded in any one of the above positioning notches 18a, see Figure 5 shown.

[0067] In this embodiment, the end of the positioning hole 14a has a ring-shaped protruding blocking edge 14a1, and the diameter of the ball 20 is slightly larger t...

Embodiment 3

[0070] The structure and principle of this embodiment are basically the same as that of Embodiment 1. The difference is that there is a guide rail 2 21 in the housing 1, and the guide rail 2 21 is parallel to the connecting line direction of the reflector 11 and the reflector 2 12. Mirror one 11 is opposite to the laser beam emitted by laser one 3. Reflective mirror two 12 is connected on the guide rail two 21 and can translate along the guide rail two 21. There is a mirror two 12 between the reflective mirror two 12 and the inside of the housing 1. The locking mechanism positioned on the second rail 21.

[0071] In order to connect securely and connect conveniently, in this embodiment, the reflector 2 12 is fixedly connected to the locking block 22 , and the locking block 22 is located at the guide rail 2 21 and can translate along the guide rail 2 21 .

[0072] The locking mechanism comprises a locking bar 23 and a locking hole 22a at the bottom of the locking block 22 fixed...

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PUM

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Abstract

The invention provides a focusing deflection displacement sensor, belonging to the technical field of machines. The focusing deflection displacement sensor solves the problem that the existing sensor has large measuring error. The focusing deflection displacement sensor comprises a shell, wherein an objective lens, imaging mirrors, lasers, beam splitter prisms and photoelectric displacement detectors are connected in the shell, the objective lens, the beam splitter prism I, the beam splitter prism II, the imaging mirror I and the photoelectric displacement detector I are arranged in the shell from right to left, the laser I and the laser II are both positioned at the upper part of the beam splitter prism I, laser light beams from the laser I and the laser II are parallel and two beams of laser light can enter the beam splitter prism I, the photoelectric displacement detector II is arranged at the upper part of the beam splitter prism II, and the imaging mirror II is positioned between the photoelectric displacement detector II and the beam splitter prism II. The sensor has small measurement error.

Description

technical field [0001] The invention relates to a sensor, in particular to a focus offset displacement sensor. Background technique [0002] The optical displacement sensor based on laser focus offset has the advantages of high sensitivity, good stability, simple mechanism, and large dynamic range. [0003] However, when the above sensors measure small displacements, if the surface to be measured is inclined, errors will occur in the displacement measurement. [0004] Its publication number CN102494818A of Chinese patent provides " a kind of double laser signal torque sensor ", and it comprises the first measuring module and the second measuring module with the same structure, and signal processing module and moving mechanism; Moving mechanism is arranged on the torque input shaft and convert the rotary motion of the input torque shaft into linear motion; the first measurement module and the second measurement module are respectively installed at both ends of the moving mec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 陆惠宗
Owner 海宁科海光电科技有限公司