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Tubular molybdenum target material preparation method

A molybdenum target and tubular technology is applied in the field of preparation of tubular molybdenum targets, which can solve the problems of high production cost, limited extrusion specifications, low production efficiency, etc., and achieve the effects of uniform and good surface quality, good structure and improved life.

Active Publication Date: 2014-08-13
JINDUICHENG MOLYBDENUM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the most commonly used forming process of molybdenum products (powder metallurgy) cannot meet the density requirements of the target, so it is necessary to add a thermal processing process to improve the density of its products
For large-scale tube targets, forging is often used to increase the density. The processing process of this method is to prepare a large-diameter billet first, then forge it to the required outer diameter size, and then obtain the required size through drilling and machining. tube target, the disadvantages of this method are high production cost, low production efficiency and low material utilization rate, and even molybdenum target with larger diameter cannot be processed
There is also a domestic method of preparing molybdenum tube targets. The sintered molybdenum tube targets are simply forged and machined to obtain tube targets of the required size. This forging method is actually an orthopedic molybdenum tube target, and the general density is 9.8 g / cm 3 , cannot meet the requirements of high density, and can only be used in the field of sputtering where the quality of the target is not high
[0004] Chinese patent CN101052740A discloses a method for preparing a tubular target. This patent adopts cold isostatic pressing, sintering and extrusion processes to prepare tubular targets, but there is no specific requirement for the sintering process and extrusion process in this patent, and Extrusion specifications are limited, therefore, the molybdenum tube target produced by this patent does not have advantages in use and performance

Method used

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  • Tubular molybdenum target material preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Preparation of tubular molybdenum target with specifications of Ф163 / Ф135×1500mm:

[0029] Step 1. Choose a product with a quality purity ≥ 99.95%, and an apparent density of 1.7g / cm 3 The commercially available molybdenum powder is evenly loaded into the mold, formed by cold isostatic pressing, and a small amount of turning and shaping is carried out to obtain a molybdenum tube billet; the appearance of the molybdenum tube billet is silvery white, without black material and mechanical inclusions, The curvature of the tube blank does not exceed 3mm / m;

[0030] Step 2. Under a hydrogen atmosphere, sinter the molybdenum tube blank described in step 1. The specific process is:

[0031] Step 201, one-stage sintering: place the molybdenum tube blank vertically in a sintering furnace, first raise the temperature to 400°C and then keep it for 3 hours, then raise the temperature to 800°C and then keep it for 3 hours, then raise the temperature to 1200°C and then keep it for 3 ...

Embodiment 2

[0037] Preparation of tubular molybdenum target with specifications of Ф200 / Ф170×2100mm:

[0038] Step 1. Choose a product with a mass purity ≥ 99.95% and a bulk density of 1.8g / cm 3 The commercially available molybdenum powder is evenly loaded into the mold, formed by cold isostatic pressing, and a small amount of turning and shaping is carried out to obtain a molybdenum tube billet; the appearance of the molybdenum tube billet is silvery white, without black material and mechanical inclusions, The curvature of the tube blank does not exceed 3mm / m;

[0039] Step 2. Under a hydrogen atmosphere, sinter the molybdenum tube blank described in step 1. The specific process is:

[0040] Step 201, one-stage sintering: place the molybdenum tube billet vertically in the sintering furnace, first raise the temperature to 450°C and then keep it for 3 hours, then raise the temperature to 850°C and then keep it for 3 hours, then raise the temperature to 1250°C and then keep it for 3 hours,...

Embodiment 3

[0045] Preparation of tubular molybdenum target with specifications of Ф130 / Ф100×4100mm:

[0046] Step 1. Choose a product with a quality purity ≥ 99.95%, and an apparent density of 2.0g / cm 3 The commercially available molybdenum powder is evenly loaded into the mold, formed by cold isostatic pressing, and a small amount of turning and shaping is carried out to obtain a molybdenum tube billet; the appearance of the molybdenum tube billet is silvery white, without black material and mechanical inclusions, The curvature of the tube blank does not exceed 3mm / m;

[0047] Step 2. Under a hydrogen atmosphere, sinter the molybdenum tube blank described in step 1. The specific process is:

[0048] Step 201, one-stage sintering: place the molybdenum tube billet vertically in the sintering furnace, first raise the temperature to 350°C and then keep it for 4 hours, then raise the temperature to 750°C and then keep it for 4 hours, then raise the temperature to 1100°C and then keep it for...

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Abstract

The invention provides a tubular molybdenum target material preparation method. The method comprises the following steps: 1, molybdenum powder is compressed into a molybdenum tube blank; 2, a two-stage sintering process is adopted, and the molybdenum tube blank is subjected to sintering processing; 3, the molybdenum tube blank which is subjected to sintering processing is heated, and then is extruded and processed, and a tubular molybdenum target material is obtained after turning processing. According to the preparation method, cuttings are fewer, the production efficiency is high, the length of a molybdenum tube is adjustable, and the cost advantage is obvious; the production technological process is short, the metal loss is little, the comprehensive finished product rate is high, and the tubular molybdenum target material used for sputtering is conveniently, rapidly and largely produced.

Description

technical field [0001] The invention belongs to the technical field of processing refractory metal materials, and in particular relates to a method for preparing a tubular molybdenum target. Background technique [0002] Due to its good electrical properties and thermal stability, molybdenum is widely used in the manufacture of flat-panel displays and thin-film solar cells, and the rapid development of flat-panel displays and photovoltaic industries has also greatly driven the market demand for molybdenum sputtering targets. Due to the limitation of the size of the rolling mill for planar targets, only molybdenum plate targets with a width of 1.2m can be produced in China at present, and the sputtering utilization rate is low. Compared with the planar target, the design of the rotating target structure shows its substantial advantages. The change in geometry and design from the planar target to the rotating target increases the utilization rate of the target, and the utiliza...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00C23C14/34B22F3/16B21C23/00
CPCB23P15/00C23C14/3414
Inventor 朱琦王林王娜杨秦莉
Owner JINDUICHENG MOLYBDENUM CO LTD
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