Vacuum system for thin film evaporation-rectification coupled device
A rectification coupling and vacuum system technology, applied in the field of vacuum systems, can solve the problems of reducing the vacuum degree of the system, affecting the emulsification of vacuum pump oil, and affecting the stability of vacuum pumps, etc.
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[0015] Such as figure 1 As shown, a vacuum system for the coupling equipment system of thin film evaporation and rectification includes a vacuum pump 3, one end of the vacuum pump 3 is connected to the buffer tank 2 through a pipeline, and the buffer tank 2 is connected to the coupling equipment system 1 of thin film evaporation and rectification through a pipeline, The other end of the vacuum pump 3 is connected to the receiver 5 through a pipeline, and the receiver 5 is provided with a condenser 4 . The vacuum pump 3 is a dry screw vacuum pump. Both the condenser 4 and the receiver 5 are made of glass. The pressure of the vacuum system is 5Pa-2000Pa. The top of the condenser 4 is an open structure and is connected to the atmosphere. Coupling equipment system 1 for thin film evaporation and rectification is the coupling equipment system for thin film evaporation and rectification described in the Chinese utility model patent with application number 201320122760.0 titled "A...
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