r-t-b permanent magnet
A R-T-B, R1-T-B technology, applied in the direction of magnetic materials, magnetic objects, magnetic films, etc., can solve problems such as irreplaceable and low magnetic properties
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[0051] Hereinafter, although the content of this invention is demonstrated in detail using an Example and a comparative example, this invention is not limited to the following Example.
[0052] The target material is manufactured so that the film formed by sputtering becomes Nd 15 Fe 78 B 7 、Pr 15 Fe 78 B 7 , (Y a La b ) 15 Fe 78 B 7 , Y 15 Fe 78 B 7 , La 15 Fe 78 B 7 Nd-Fe-B alloy target, Pr-Fe-B alloy target, (Y, La)-Fe-B alloy target, Y-Fe-B alloy target, and La-Fe -B alloy target. In addition, the (Y, La)-Fe-B alloy target material produced the target material which changed the ratio of Y and La many. A silicon substrate is prepared on a base material to be formed into a film. The conditions are as follows, the size of the target is 76.2 mm in diameter, the size of the substrate is 10 mm×10 mm, and the in-plane uniformity of the film is sufficiently maintained.
[0053] The film forming device can be used in 10 -8 A device that exhausts below Pa and has...
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Abstract
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