Cooling system for molded modules and corresponding manufacturing method
A cooling system and molding technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, semiconductor devices, etc., can solve the problems of increasing system weight and cost, fluid leakage, and increasing production cost, and reduce system costs. Effects of cost, low risk of fluid leakage, high design flexibility
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[0012] According to embodiments described herein, a cooling system for a molding module is provided. The cooling system comprises a number of individual modules. Each module includes a semiconductor die encapsulated by a molding compound, a plurality of leads electrically connected to the semiconductor die and at least partially uncovered by the molding compound, and a cooling plate at least partially uncovered by the molding compound. The cooling system also includes a molded body forming a multi-die module around the periphery of each individual module. The leads and cooling plate of each individual module are at least partially uncovered by the molded body. A cover with ports is attached to the periphery of the molded body at the first side of the multi-die module. The cover closes the multi-die module at a first side to form a cavity between the cover and the molded body to allow fluid exiting or entering the ports to contact the cooling plate of each individual module. ...
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