Process task processing method and system for semiconductor equipment

Abstract

The invention discloses a process task processing method and system for semiconductor equipment. The method comprises the following steps: in the process of process task processing, after receiving the user's process form editing instruction, the upper computer reads the original process form online; Analyze the content in the form, detect the specified steps that need to be modified in the original process form, and judge whether the specified steps that need to be modified in the original process form have not been executed; after judging the specified steps that need to be modified in the original process form After the number of steps is not executed, modify the specified parameters of the specified steps in the original process form; send the process form after modifying the specified parameters as a new process form to the corresponding lower computer, and control the lower computer according to the modified new process form. Each process parameter is distributed to each component of the equipment, and each component performs process task processing according to the new process list. It improves production efficiency and reduces production cost.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing control, in particular to a process task processing method and system for semiconductor equipment. Background technique [0002] The process sheet (Recipe) in the process task (Job) in the semiconductor manufacturing process contains multiple steps required in the processing process, and each step contains the values ​​of various process parameters and certain parameter settings related to this step and step duration and other information. In the automatic production process, the equipment completes the processing of materials according to the recipe. Product quality can be improved by adjusting the process sheet, so an advanced semiconductor equipment recipe processing system and method play a very important role in enhancing product value. Especially in the semiconductor manufacturing industry, the recipe should be as safe as possible to prevent accidental deletion, modification or m...

AI Technical Summary

Problems solved by technology

However, when the user adjusts the process table, that is, the process pause stage, since the physical quantities in the reaction chamber (such as gas flow, temperature, pressure, etc.) will remain unchanged, if the user adjusts the process table for too long If it is long, the state of gas flow, temperature and pressure will inevitably affect the quality of the product, and then affect the subsequent process

In addition, the process suspension stage will also increase the production cost such as the waste of process gas, and reduce the service life of key equipment components such as induction heating coils and pumps.

When users understand that process suspension may increase production costs and shorten the service life of equipment components, users generally try to shorten the adjustment time of process sheets as much as possible, which also affects user experience to a certain extent

Finally, due to the uncertainty of the time for the user to fine-tune the crafting sheet, this also makes the timing of the entire crafting process uncertain

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