Mask evaluation method and mask structure code pattern of coded mask optical imaging system
An optical imaging system and evaluation method technology, applied in the field of coding mask optical imaging system, can solve the problems of complicated process and large amount of calculation, and achieve the effect of avoiding operation errors and avoiding replacement operations.
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[0039]The mask evaluation method and mask structure code pattern of the coded mask optical imaging system of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.
[0040] The mask evaluation method of the coded mask optical imaging system of the present invention is based on the action principle of the point spread function in the imaging system on the final imaging quality, and takes the point spread function of the coded mask imaging system as the evaluation object. and trends to judge the imaging performance of a pattern.
[0041] A mask evaluation method for an coded mask optical imaging system, including three evaluation indicators: M1, M2 and RA, and the three evaluation indicators are all in a certain area with a point spread function h(x, y). The concentrated energy size is the calculation object, specifically:
[0042] The evaluation index formula M1(r) means: take the imaging center of the inciden...
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